Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components

Xiaoshan Tong; Yulong Zhao; Xin Ma; Peng Guo; Qi Zhang; Mingjie Liu; Dongliang Zhang; Aiying Wang

doi:10.1109/SENSORS43011.2019.8956612

Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components

Xiaoshan Tong
, Yulong Zhao
, Xin Ma
, Peng Guo
, Qi Zhang
, Mingjie Liu
, Dongliang Zhang
, Aiying Wang

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Amorphous carbon(a-C) is a promising material for Micro Electro-mechanical System (MEMS) due to its significant piezoresistive effect, in-situ large-area deposition and outstanding mechanical performance. In this work, a micro pressure sensor based on ultra-thin sensitive film layers (aC/Si3N4/SiO2) is proposed. In order to measure the micro pressure change, an ultra-sensitive rectangular a-C film piezo resistor with thickness of 300 nm, width of 300 μm and length of 900 μm and an ultra-thin rectangular sensitive structure with thickness of 785 nm, width of 400 μm and length of 600 μm are designed and fabricated. The simulation and testing results show that the resistance response of the ultra-thin film, with a linear relation of differential pressure, is highly sensitive. This work shows that a-C is a potential piezoresistive material for micro pressure change detection.

Original language	English
Title of host publication	2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728116341
DOIs	https://doi.org/10.1109/SENSORS43011.2019.8956612
State	Published - Oct 2019
Event	18th IEEE Sensors, SENSORS 2019 - Montreal, Canada Duration: 27 Oct 2019 → 30 Oct 2019

Publication series

Name	Proceedings of IEEE Sensors
Volume	2019-October
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	18th IEEE Sensors, SENSORS 2019
Country/Territory	Canada
City	Montreal
Period	27/10/19 → 30/10/19

Keywords

amorphous carbon film
piezoresistive effect
pressure sensors
ultra-thin sensitive structure
wet-etching

Access to Document

10.1109/SENSORS43011.2019.8956612

Cite this

Tong, X., Zhao, Y., Ma, X., Guo, P., Zhang, Q., Liu, M., Zhang, D., & Wang, A. (2019). Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components. In 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings Article 8956612 (Proceedings of IEEE Sensors; Vol. 2019-October). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSORS43011.2019.8956612

@inproceedings{e15689e24fd946a297bfef455c9e9425,

title = "Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components",

abstract = "Amorphous carbon(a-C) is a promising material for Micro Electro-mechanical System (MEMS) due to its significant piezoresistive effect, in-situ large-area deposition and outstanding mechanical performance. In this work, a micro pressure sensor based on ultra-thin sensitive film layers (aC/Si3N4/SiO2) is proposed. In order to measure the micro pressure change, an ultra-sensitive rectangular a-C film piezo resistor with thickness of 300 nm, width of 300 μm and length of 900 μm and an ultra-thin rectangular sensitive structure with thickness of 785 nm, width of 400 μm and length of 600 μm are designed and fabricated. The simulation and testing results show that the resistance response of the ultra-thin film, with a linear relation of differential pressure, is highly sensitive. This work shows that a-C is a potential piezoresistive material for micro pressure change detection.",

keywords = "amorphous carbon film, piezoresistive effect, pressure sensors, ultra-thin sensitive structure, wet-etching",

author = "Xiaoshan Tong and Yulong Zhao and Xin Ma and Peng Guo and Qi Zhang and Mingjie Liu and Dongliang Zhang and Aiying Wang",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 18th IEEE Sensors, SENSORS 2019 ; Conference date: 27-10-2019 Through 30-10-2019",

year = "2019",

month = oct,

doi = "10.1109/SENSORS43011.2019.8956612",

language = "英语",

series = "Proceedings of IEEE Sensors",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings",

}

Tong, X, Zhao, Y, Ma, X, Guo, P, Zhang, Q, Liu, M, Zhang, D & Wang, A 2019, Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components. in 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings., 8956612, Proceedings of IEEE Sensors, vol. 2019-October, Institute of Electrical and Electronics Engineers Inc., 18th IEEE Sensors, SENSORS 2019, Montreal, Canada, 27/10/19. https://doi.org/10.1109/SENSORS43011.2019.8956612

Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components. / Tong, Xiaoshan; Zhao, Yulong; Ma, Xin et al.
2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8956612 (Proceedings of IEEE Sensors; Vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components

AU - Tong, Xiaoshan

AU - Zhao, Yulong

AU - Ma, Xin

AU - Guo, Peng

AU - Zhang, Qi

AU - Liu, Mingjie

AU - Zhang, Dongliang

AU - Wang, Aiying

PY - 2019/10

Y1 - 2019/10

N2 - Amorphous carbon(a-C) is a promising material for Micro Electro-mechanical System (MEMS) due to its significant piezoresistive effect, in-situ large-area deposition and outstanding mechanical performance. In this work, a micro pressure sensor based on ultra-thin sensitive film layers (aC/Si3N4/SiO2) is proposed. In order to measure the micro pressure change, an ultra-sensitive rectangular a-C film piezo resistor with thickness of 300 nm, width of 300 μm and length of 900 μm and an ultra-thin rectangular sensitive structure with thickness of 785 nm, width of 400 μm and length of 600 μm are designed and fabricated. The simulation and testing results show that the resistance response of the ultra-thin film, with a linear relation of differential pressure, is highly sensitive. This work shows that a-C is a potential piezoresistive material for micro pressure change detection.

AB - Amorphous carbon(a-C) is a promising material for Micro Electro-mechanical System (MEMS) due to its significant piezoresistive effect, in-situ large-area deposition and outstanding mechanical performance. In this work, a micro pressure sensor based on ultra-thin sensitive film layers (aC/Si3N4/SiO2) is proposed. In order to measure the micro pressure change, an ultra-sensitive rectangular a-C film piezo resistor with thickness of 300 nm, width of 300 μm and length of 900 μm and an ultra-thin rectangular sensitive structure with thickness of 785 nm, width of 400 μm and length of 600 μm are designed and fabricated. The simulation and testing results show that the resistance response of the ultra-thin film, with a linear relation of differential pressure, is highly sensitive. This work shows that a-C is a potential piezoresistive material for micro pressure change detection.

KW - amorphous carbon film

KW - piezoresistive effect

KW - pressure sensors

KW - ultra-thin sensitive structure

KW - wet-etching

UR - https://www.scopus.com/pages/publications/85078708653

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M3 - 会议稿件

AN - SCOPUS:85078708653

T3 - Proceedings of IEEE Sensors

BT - 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 18th IEEE Sensors, SENSORS 2019

Y2 - 27 October 2019 through 30 October 2019

ER -

Micro Pressure Sensors Based on Ultra-thin Amorphous Carbon Film as both Sensitive and Structural Components

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