Mems piezoelectric vibration energy harvester with in-plane pzt bimorph

Lu Wang; Libo Zhao; Zhuangde Jiang; Xiang Li; Zihang Chen; Maeda Ryutaro

doi:10.1109/NEMS.2019.8915611

Mems piezoelectric vibration energy harvester with in-plane pzt bimorph

Lu Wang
, Libo Zhao
, Zhuangde Jiang
, Xiang Li
, Zihang Chen
, Maeda Ryutaro

Xi'an Jiaotong University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In order to overcome the drawbacks of conventional-plane vibration MEMS-PVEH. We have presented an in-plane vibration MEMS-PVEH with bimorph PZT by bonding bulk PZT. Performance of two kinds of PVEHs were studied by finite element method using COMSOL software. Including vibration modes, resonant frequencies, open circuit voltage, peak power, optimal resistance, and the static stress at gravity load of the structure. Compare to the conventional-plane vibration PVEH, the proposed in-plane vibration PVEH has lower resonant frequency of 122 Hz, higher peak power of 50 μW. It has advantages of heavier proof mass, good performance PZT bimorph, thinner cantilever thickness, convenient electrodes lead, and has the frame to protect the oscillator. Besides, in-plane vibration PVEH is convenient to be fabricated by planar graphical MEMS process.

Original language	English
Title of host publication	Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	355-359
Number of pages	5
ISBN (Electronic)	9781728116297
DOIs	https://doi.org/10.1109/NEMS.2019.8915611
State	Published - Apr 2019
Event	14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019 - Bangkok, Thailand Duration: 11 Apr 2019 → 14 Apr 2019

Publication series

Name	Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019

Conference

Conference	14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019
Country/Territory	Thailand
City	Bangkok
Period	11/04/19 → 14/04/19

Keywords

In-plane vibration
MEMS
PVEH
PZT
Resonant frequency

Access to Document

10.1109/NEMS.2019.8915611

Cite this

Wang, L., Zhao, L., Jiang, Z., Li, X., Chen, Z., & Ryutaro, M. (2019). Mems piezoelectric vibration energy harvester with in-plane pzt bimorph. In Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019 (pp. 355-359). Article 8915611 (Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2019.8915611

Wang, Lu ; Zhao, Libo ; Jiang, Zhuangde et al. / Mems piezoelectric vibration energy harvester with in-plane pzt bimorph. Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 355-359 (Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019).

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title = "Mems piezoelectric vibration energy harvester with in-plane pzt bimorph",

abstract = "In order to overcome the drawbacks of conventional-plane vibration MEMS-PVEH. We have presented an in-plane vibration MEMS-PVEH with bimorph PZT by bonding bulk PZT. Performance of two kinds of PVEHs were studied by finite element method using COMSOL software. Including vibration modes, resonant frequencies, open circuit voltage, peak power, optimal resistance, and the static stress at gravity load of the structure. Compare to the conventional-plane vibration PVEH, the proposed in-plane vibration PVEH has lower resonant frequency of 122 Hz, higher peak power of 50 μW. It has advantages of heavier proof mass, good performance PZT bimorph, thinner cantilever thickness, convenient electrodes lead, and has the frame to protect the oscillator. Besides, in-plane vibration PVEH is convenient to be fabricated by planar graphical MEMS process.",

keywords = "In-plane vibration, MEMS, PVEH, PZT, Resonant frequency",

author = "Lu Wang and Libo Zhao and Zhuangde Jiang and Xiang Li and Zihang Chen and Maeda Ryutaro",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019 ; Conference date: 11-04-2019 Through 14-04-2019",

year = "2019",

month = apr,

doi = "10.1109/NEMS.2019.8915611",

language = "英语",

series = "Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "355--359",

booktitle = "Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019",

}

Wang, L, Zhao, L , Jiang, Z, Li, X, Chen, Z & Ryutaro, M 2019, Mems piezoelectric vibration energy harvester with in-plane pzt bimorph. in Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019., 8915611, Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Institute of Electrical and Electronics Engineers Inc., pp. 355-359, 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019, Bangkok, Thailand, 11/04/19. https://doi.org/10.1109/NEMS.2019.8915611

Mems piezoelectric vibration energy harvester with in-plane pzt bimorph. / Wang, Lu; Zhao, Libo ; Jiang, Zhuangde et al.
Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019. Institute of Electrical and Electronics Engineers Inc., 2019. p. 355-359 8915611 (Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Mems piezoelectric vibration energy harvester with in-plane pzt bimorph

AU - Wang, Lu

AU - Zhao, Libo

AU - Jiang, Zhuangde

AU - Li, Xiang

AU - Chen, Zihang

AU - Ryutaro, Maeda

PY - 2019/4

Y1 - 2019/4

N2 - In order to overcome the drawbacks of conventional-plane vibration MEMS-PVEH. We have presented an in-plane vibration MEMS-PVEH with bimorph PZT by bonding bulk PZT. Performance of two kinds of PVEHs were studied by finite element method using COMSOL software. Including vibration modes, resonant frequencies, open circuit voltage, peak power, optimal resistance, and the static stress at gravity load of the structure. Compare to the conventional-plane vibration PVEH, the proposed in-plane vibration PVEH has lower resonant frequency of 122 Hz, higher peak power of 50 μW. It has advantages of heavier proof mass, good performance PZT bimorph, thinner cantilever thickness, convenient electrodes lead, and has the frame to protect the oscillator. Besides, in-plane vibration PVEH is convenient to be fabricated by planar graphical MEMS process.

AB - In order to overcome the drawbacks of conventional-plane vibration MEMS-PVEH. We have presented an in-plane vibration MEMS-PVEH with bimorph PZT by bonding bulk PZT. Performance of two kinds of PVEHs were studied by finite element method using COMSOL software. Including vibration modes, resonant frequencies, open circuit voltage, peak power, optimal resistance, and the static stress at gravity load of the structure. Compare to the conventional-plane vibration PVEH, the proposed in-plane vibration PVEH has lower resonant frequency of 122 Hz, higher peak power of 50 μW. It has advantages of heavier proof mass, good performance PZT bimorph, thinner cantilever thickness, convenient electrodes lead, and has the frame to protect the oscillator. Besides, in-plane vibration PVEH is convenient to be fabricated by planar graphical MEMS process.

KW - In-plane vibration

KW - MEMS

KW - PVEH

KW - PZT

KW - Resonant frequency

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U2 - 10.1109/NEMS.2019.8915611

DO - 10.1109/NEMS.2019.8915611

M3 - 会议稿件

AN - SCOPUS:85076683092

T3 - Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019

SP - 355

EP - 359

BT - Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019

Y2 - 11 April 2019 through 14 April 2019

ER -

Wang L, Zhao L , Jiang Z, Li X, Chen Z, Ryutaro M. Mems piezoelectric vibration energy harvester with in-plane pzt bimorph. In Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019. Institute of Electrical and Electronics Engineers Inc. 2019. p. 355-359. 8915611. (Proceedings of the 14th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2019). doi: 10.1109/NEMS.2019.8915611

Mems piezoelectric vibration energy harvester with in-plane pzt bimorph

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Keywords

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