TY - JOUR
T1 - MEMS piezo-resistive force sensor based on DC sputtering deposited amorphous carbon films
AU - Ma, Xin
AU - Tong, Xiaoshan
AU - Guo, Peng
AU - Zhao, Yulong
AU - Zhang, Qi
AU - Li, Hanchao
AU - Chen, Rende
AU - Wang, Aiying
N1 - Publisher Copyright:
© 2019 Elsevier B.V.
PY - 2020/3/1
Y1 - 2020/3/1
N2 - The rapid growing demand of micro-electromechanical system (MEMS) sensors brings an urgent need for high performance and low cost sensitive materials. In this work, amorphous carbon (a-C) film was in-situ deposited on silicon substrate as strain sensitive component using economical direct current (DC) magnetron sputtering process and the a-C sensor was systematically designed, fabricated and tested. By adjusting the negative bias voltage in the range of 0–400 V, the gauge factor (GF) of the a-C film was adjusted within the range of 3.3–6.9. What's more, the film's sp2 cluster size played an important role in their piezo-resistive performance and conductivity, which illustrated the thick-film resistors (TFRs) theory. Additionally, CAFM results also supported the applying of TFRs theory in this work. Benefiting from the outstanding performance of a-C film, the MEMS force sensor, consisted a Wheatstone full-bridge with four a-C piezo-resistors, had a sensitivity of 9.8 μV/V/mN and non-linearity about 2.0% FS in the testing range of 0–210 mN, while it also showed a good repeatability. These investigations provided deeper insight into the piezo-resistive behavior of a-C film and contributed to the development of high performance and more economical sensitive materials for MEMS sensors.
AB - The rapid growing demand of micro-electromechanical system (MEMS) sensors brings an urgent need for high performance and low cost sensitive materials. In this work, amorphous carbon (a-C) film was in-situ deposited on silicon substrate as strain sensitive component using economical direct current (DC) magnetron sputtering process and the a-C sensor was systematically designed, fabricated and tested. By adjusting the negative bias voltage in the range of 0–400 V, the gauge factor (GF) of the a-C film was adjusted within the range of 3.3–6.9. What's more, the film's sp2 cluster size played an important role in their piezo-resistive performance and conductivity, which illustrated the thick-film resistors (TFRs) theory. Additionally, CAFM results also supported the applying of TFRs theory in this work. Benefiting from the outstanding performance of a-C film, the MEMS force sensor, consisted a Wheatstone full-bridge with four a-C piezo-resistors, had a sensitivity of 9.8 μV/V/mN and non-linearity about 2.0% FS in the testing range of 0–210 mN, while it also showed a good repeatability. These investigations provided deeper insight into the piezo-resistive behavior of a-C film and contributed to the development of high performance and more economical sensitive materials for MEMS sensors.
KW - Amorphous carbon film
KW - Force sensor
KW - Gauge factor
KW - MEMS
KW - Piezo-resistive effect
UR - https://www.scopus.com/pages/publications/85075403054
U2 - 10.1016/j.sna.2019.111700
DO - 10.1016/j.sna.2019.111700
M3 - 文章
AN - SCOPUS:85075403054
SN - 0924-4247
VL - 303
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
M1 - 111700
ER -