MEMS based ultra-high order frequency multiplication utilizing superharmonic synchronization effect

Frequency multipliers are widely present in electronic system, which always cooperates with low frequency local oscillator for delivering an output wave with a frequency that an exact integral multiple of the input frequency. Conventional frequency multiplier such as step recovery diode, field-effect transistors, low spurious harmonic, etc., usually has only two or three low multiplication factor. Multi-stage frequency doublers can accumulate the multiplication factor, however, has high power consumption and negative conversion gain. Here, we proposed a novel frequency multiplication mechanism utilizing superharmonic synchronization (SHS) effect in micromechanical resonator. We achieved up to 121th ultra-high frequency amplification with frequency stability of output signal 92 times improved and signal to noise ratio 20% increased. To solve the limitation of narrow synchronization range, a frequency automatic tracking system is designed to expand the working range from 0.62 Hz to 27.5 kHz. The proposed frequency amplification is a promising candidate for frequency multipliers and provides an alternative mechanism for micromechanical sensing and signal processing system.