@inproceedings{b4db257200424b07b284b8d6d10f2498,
title = "MEMS-based novel X-ray optics for future astronomical missions",
abstract = "We have been developing our original MEMS-based X-ray optics for future astronomical missions. To date, we verified the focusing of optical light and X-ray for the first time. The concept and recent advances are reviewed.",
keywords = "DRIE, X-ray optics, annealing",
author = "Ikuyuki Mitsuishi and Yuichiro Ezoe and Teppei Moriyama and Tomohiro Ogawa and Takuya Kakiuchi and Takaya Ohashi and Makoto Mita and Yoshitomo Maeda and Kazuhisa Mitsuda and Mitsuhiro Horade and Susumu Sugiyama and Raul Riveros and Hitomi Yamaguchi and Yoshiaki Kanamori and Kohei Morishita and Kazuo Nakajima and Ryutaro Maeda",
year = "2012",
doi = "10.1109/OMEMS.2012.6318815",
language = "英语",
isbn = "9781457715112",
series = "International Conference on Optical MEMS and Nanophotonics",
pages = "87--88",
booktitle = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012",
note = "2012 International Conference on Optical MEMS and Nanophotonics, OMN 2012 ; Conference date: 06-08-2012 Through 09-08-2012",
}