MEMS based focus plane array for infrared imaging

Based on the opto-mechanical effect and MEMS technology, a novel substrate-free FPA with a thermally isolated structure for uncooled infrared imaging is developed. Alternately evaporating Au on a SiN, cantilever is used for thermal isolation. A human's thermal image is obtained successfully using the infrared imaging system composed of the FPA and optical detection system. Experimental results show that the realization of thermal isolation in the substrate-free FPA increases the temperature of the deflecting leg effectively, while the NETD is about 200 mK.