MEMS起爆器研究现状与发展趋势

With the application of micro-nano technology, the new generation of detonators based on MEMS technology has become one of the research hot spots in the field of energetic devices. MEMS detonator can be realized by mass and highly intensive integrated fabrication, and the output performance is consistent, with the characteristics of miniaturization, integration and high-energy. Based on different structures, the MEMS detonator can be divided into three categories, which are explosive foil, semiconductor bridge(SCB) and porous silicon. The explosive foil MEMS detonator has simple structure and is highly safe. SCB MEMS detonator has a broader application field, and can be initiated by low voltage. By adding energetic materials, the output energy of SCB can be improved drastically. Compared to traditional C-H-N-O energetic material, porous silicon is more active and environmental friendly. Through analyzing the composed structure, way of detonation, fabrication process and output performance, is points out that the miniature structure, high output energy and controllable detonation are the main characters of MEMS detonator, and proposes the MEMS detonation system, which can balance the high output energy and high safety, is an important development direction of MEMS detonator.