@article{5b81ffe8a77f42e88f51738d10d57ae6,
title = "Mechanical lithography - State of the art and the future",
keywords = "Cantilever array, Mechanical lithography, Nanoimprinting, SPM",
author = "Ryutaro Maeda and Kiwamu Ashida",
year = "2004",
month = oct,
doi = "10.2493/jjspe.70.1219",
language = "英语",
volume = "70",
pages = "1219--1222",
journal = "Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering",
issn = "0912-0289",
publisher = "Japan Society for Precision Engineering",
number = "10",
}