Manufacture of specific structure of aluminum-doped zinc oxide films by patterning the substrate surface

X. Jiang; C. L. Jia; B. Szyszka

doi:10.1063/1.1473683

Manufacture of specific structure of aluminum-doped zinc oxide films by patterning the substrate surface

X. Jiang
, C. L. Jia
, B. Szyszka

Fraunhofer Institute for Surface Engineering and Thin Films
Jülich Research Centre

Research output: Contribution to journal › Article › peer-review

95 Scopus citations

Abstract

(0001)-oriented aluminum-doped zinc oxide films were prepared using a magnetron sputtering technique. High-resolution transmission-electron- microscopic images show that the oriented grains nucleate directly on the substrate surface and grow with equal lateral dimensions through the film thickness. A surface-energy-driven self-texture mechanism was proposed on the basis of process modes. A method for manufacturing specific film structure by patterning the substrate surface is tested and discussed.

Original language	English
Pages (from-to)	3090-3092
Number of pages	3
Journal	Applied Physics Letters
Volume	80
Issue number	17
DOIs	https://doi.org/10.1063/1.1473683
State	Published - 29 Apr 2002
Externally published	Yes

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title = "Manufacture of specific structure of aluminum-doped zinc oxide films by patterning the substrate surface",

abstract = "(0001)-oriented aluminum-doped zinc oxide films were prepared using a magnetron sputtering technique. High-resolution transmission-electron- microscopic images show that the oriented grains nucleate directly on the substrate surface and grow with equal lateral dimensions through the film thickness. A surface-energy-driven self-texture mechanism was proposed on the basis of process modes. A method for manufacturing specific film structure by patterning the substrate surface is tested and discussed.",

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AU - Jiang, X.

AU - Jia, C. L.

AU - Szyszka, B.

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Y1 - 2002/4/29

N2 - (0001)-oriented aluminum-doped zinc oxide films were prepared using a magnetron sputtering technique. High-resolution transmission-electron- microscopic images show that the oriented grains nucleate directly on the substrate surface and grow with equal lateral dimensions through the film thickness. A surface-energy-driven self-texture mechanism was proposed on the basis of process modes. A method for manufacturing specific film structure by patterning the substrate surface is tested and discussed.

AB - (0001)-oriented aluminum-doped zinc oxide films were prepared using a magnetron sputtering technique. High-resolution transmission-electron- microscopic images show that the oriented grains nucleate directly on the substrate surface and grow with equal lateral dimensions through the film thickness. A surface-energy-driven self-texture mechanism was proposed on the basis of process modes. A method for manufacturing specific film structure by patterning the substrate surface is tested and discussed.

UR - https://www.scopus.com/pages/publications/79956018368

U2 - 10.1063/1.1473683

DO - 10.1063/1.1473683

M3 - 文章

AN - SCOPUS:79956018368

SN - 0003-6951

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SP - 3090

EP - 3092

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 17

ER -

Manufacture of specific structure of aluminum-doped zinc oxide films by patterning the substrate surface

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