Low-permittivity BaCuSi₄O₁₀-based dielectric Ceramics: An available solution to connect low temperature cofired ceramic technology and millimeter-wave communications

Low temperature cofired ceramic (LTCC) technology can serve for next-generation millimeter-wave electronic products to bring the advantages of integration, miniaturization and excellent high-frequency performance. However, challenges such as the performance of LTCC powders, quality of green tapes and Ag co-firing compatibility still need to be addressed for the application of LTCC technology. In this work, a systematic investigation from powder modification, LTCC process to filter design were carried out based on novel BaCuSi₄O₁₀-based dielectric ceramics. Multiple effects in terms of suitable sintering temperature (840 ℃ suit for Ag co-firing), low-permittivity (ε_r ∼ 5.7) and good thermal stability (temperature coefficient of resonant frequency ∼ − 27 ppm/℃, thermal expansion coefficient ∼3.9 ppm/℃) were achieved by introducing Li-B-Si glass and LiF composite additive. The origin of dielectric response of this LTCC system were discussed using the FIR reflectivity spectrum and THz-TDS. After optimizing the tape casting process for the LTCC powder, green tapes with uniform thickness, smooth surface and no cracking were obtained. Furthermore, the bandpass and lowpass filters exhibited a high level of filtering performance own to excellent dielectric properties and low surface roughness of the LTCC. Consequently, the BaCuSi₄O₁₀-based dielectric ceramic is an attractive candidate as LTCC technology expands into millimeter-wave communications.