Low Loss Millimeter Wave Antennas Using Modified Silicon Micromachining Process

Peiqin Liu; Le Chang; Yue Li; Zhijun Zhang; Zhenghe Feng

doi:10.1109/CSQRWC.2018.8455491

Low Loss Millimeter Wave Antennas Using Modified Silicon Micromachining Process

Peiqin Liu
, Le Chang
, Yue Li
, Zhijun Zhang
, Zhenghe Feng

Tsinghua University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper, modified silicon micromachining process is proposed for designing low loss antennas in millimeter wave band. Low loss property is important for improving radiation efficiency, especially in millimeter wave applications. Modified silicon micromachining process is a novel MEMS micromachining technology. With this technique, millimeter wave antennas can be fabricated with air media instead of dielectric, which effectively reduces the dielectric loss. Moreover, the technology is a MEMS process, so it is very suitable for system-on-chip (SoC) applications. In this paper, the fabrication processes and principles are demonstrated, and three low loss antennas are presented in 60 GHz millimeter wave band.

Original language	English
Title of host publication	2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781538664230
DOIs	https://doi.org/10.1109/CSQRWC.2018.8455491
State	Published - 5 Sep 2018
Externally published	Yes
Event	2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018 - Xuzhou, China Duration: 21 Jul 2018 → 24 Jul 2018

Publication series

Name	2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018

Conference

Conference	2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018
Country/Territory	China
City	Xuzhou
Period	21/07/18 → 24/07/18

Keywords

low loss antenna
millimeter wave
modified silicon micromachining process

Access to Document

10.1109/CSQRWC.2018.8455491

Cite this

Liu, P., Chang, L., Li, Y., Zhang, Z., & Feng, Z. (2018). Low Loss Millimeter Wave Antennas Using Modified Silicon Micromachining Process. In 2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018 Article 8455491 (2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CSQRWC.2018.8455491

Liu, Peiqin ; Chang, Le ; Li, Yue et al. / Low Loss Millimeter Wave Antennas Using Modified Silicon Micromachining Process. 2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018. Institute of Electrical and Electronics Engineers Inc., 2018. (2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018).

@inproceedings{0c9834077e0344c88c3db4777b0587a7,

title = "Low Loss Millimeter Wave Antennas Using Modified Silicon Micromachining Process",

abstract = "In this paper, modified silicon micromachining process is proposed for designing low loss antennas in millimeter wave band. Low loss property is important for improving radiation efficiency, especially in millimeter wave applications. Modified silicon micromachining process is a novel MEMS micromachining technology. With this technique, millimeter wave antennas can be fabricated with air media instead of dielectric, which effectively reduces the dielectric loss. Moreover, the technology is a MEMS process, so it is very suitable for system-on-chip (SoC) applications. In this paper, the fabrication processes and principles are demonstrated, and three low loss antennas are presented in 60 GHz millimeter wave band.",

keywords = "low loss antenna, millimeter wave, modified silicon micromachining process",

author = "Peiqin Liu and Le Chang and Yue Li and Zhijun Zhang and Zhenghe Feng",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018 ; Conference date: 21-07-2018 Through 24-07-2018",

year = "2018",

month = sep,

day = "5",

doi = "10.1109/CSQRWC.2018.8455491",

language = "英语",

series = "2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018",

}

Liu, P, Chang, L, Li, Y, Zhang, Z & Feng, Z 2018, Low Loss Millimeter Wave Antennas Using Modified Silicon Micromachining Process. in 2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018., 8455491, 2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018, Institute of Electrical and Electronics Engineers Inc., 2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018, Xuzhou, China, 21/07/18. https://doi.org/10.1109/CSQRWC.2018.8455491

Low Loss Millimeter Wave Antennas Using Modified Silicon Micromachining Process. / Liu, Peiqin; Chang, Le; Li, Yue et al.
2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018. Institute of Electrical and Electronics Engineers Inc., 2018. 8455491 (2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Low Loss Millimeter Wave Antennas Using Modified Silicon Micromachining Process

AU - Liu, Peiqin

AU - Chang, Le

AU - Li, Yue

AU - Zhang, Zhijun

AU - Feng, Zhenghe

PY - 2018/9/5

Y1 - 2018/9/5

N2 - In this paper, modified silicon micromachining process is proposed for designing low loss antennas in millimeter wave band. Low loss property is important for improving radiation efficiency, especially in millimeter wave applications. Modified silicon micromachining process is a novel MEMS micromachining technology. With this technique, millimeter wave antennas can be fabricated with air media instead of dielectric, which effectively reduces the dielectric loss. Moreover, the technology is a MEMS process, so it is very suitable for system-on-chip (SoC) applications. In this paper, the fabrication processes and principles are demonstrated, and three low loss antennas are presented in 60 GHz millimeter wave band.

AB - In this paper, modified silicon micromachining process is proposed for designing low loss antennas in millimeter wave band. Low loss property is important for improving radiation efficiency, especially in millimeter wave applications. Modified silicon micromachining process is a novel MEMS micromachining technology. With this technique, millimeter wave antennas can be fabricated with air media instead of dielectric, which effectively reduces the dielectric loss. Moreover, the technology is a MEMS process, so it is very suitable for system-on-chip (SoC) applications. In this paper, the fabrication processes and principles are demonstrated, and three low loss antennas are presented in 60 GHz millimeter wave band.

KW - low loss antenna

KW - millimeter wave

KW - modified silicon micromachining process

UR - https://www.scopus.com/pages/publications/85058277470

U2 - 10.1109/CSQRWC.2018.8455491

DO - 10.1109/CSQRWC.2018.8455491

M3 - 会议稿件

AN - SCOPUS:85058277470

T3 - 2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018

BT - 2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018

Y2 - 21 July 2018 through 24 July 2018

ER -

Liu P, Chang L, Li Y, Zhang Z, Feng Z. Low Loss Millimeter Wave Antennas Using Modified Silicon Micromachining Process. In 2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018. Institute of Electrical and Electronics Engineers Inc. 2018. 8455491. (2018 Cross Strait Quad-Regional Radio Science and Wireless Technology Conference, CSQRWC 2018). doi: 10.1109/CSQRWC.2018.8455491

Low Loss Millimeter Wave Antennas Using Modified Silicon Micromachining Process

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this