Abstract
In the nanolithography, some exciting developments have been motivated by the tapered metal-coated optical fiber probe irradiated by ultra-fast pulse laser. To explore the related mechanism, the local field is studied using the finite element method in this paper. The simulation results show the reflection at the cut-off plane, edge enhancement effect and surface plasmon resonance become the major factors affecting the near-field. In addition, Based on the near-field distribution and characteristics, the new promising scheme is proposed for near-field nanolithography.
| Original language | English |
|---|---|
| Pages (from-to) | 90-97 |
| Number of pages | 8 |
| Journal | Integrated Ferroelectrics |
| Volume | 164 |
| Issue number | 1 |
| DOIs | |
| State | Published - 2015 |
Keywords
- Enhancement
- Nanolithography
- Near-field
- Optical fiber probe