Local field enhancement characteristics in a tapered metal-coated optical fiber probe for nanolithography

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28 Scopus citations

Abstract

In the nanolithography, some exciting developments have been motivated by the tapered metal-coated optical fiber probe irradiated by ultra-fast pulse laser. To explore the related mechanism, the local field is studied using the finite element method in this paper. The simulation results show the reflection at the cut-off plane, edge enhancement effect and surface plasmon resonance become the major factors affecting the near-field. In addition, Based on the near-field distribution and characteristics, the new promising scheme is proposed for near-field nanolithography.

Original languageEnglish
Pages (from-to)90-97
Number of pages8
JournalIntegrated Ferroelectrics
Volume164
Issue number1
DOIs
StatePublished - 2015

Keywords

  • Enhancement
  • Nanolithography
  • Near-field
  • Optical fiber probe

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