@inproceedings{ac699902be3446019461ab6fed73ce74,
title = "Liquid packaging effects on piezoresistive MEMS accelerometer",
abstract = "MEMS (Micro-electro Mechanical Systems) accelerometers are wildly used in vibration and impact detecting. Piezoresistive accelerometer is one of the wildly used types of sensor on the market with normal air package. However, when it is used in high impact environment, its fragile sensitive parts might get damaged. In this paper, we tried to use non-conducting liquid instead of air to fill the package shell of piezoresistive accelerometer. Its sensitivity and measuring range were analyzed when the package shell was filled with glycerinum, cyclohexane and silicon oil, respectively. Its resonant frequencies with glycerinum, cyclohexane and silicon oil package were also analyzed. The conclusion is that the liquid package is more suitable than air package for the piezoresistive MEMS accelerometer in harsh environment.",
keywords = "Liquid package, MEMS, Piezoresistive, Resonant frequency, Sensitivity",
author = "Xixiang Liu and Weile Jiang and Libo Zhao and Chen Jia and Mingzhi Yu and Zhuangde Jiang",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 ; Conference date: 26-03-2018 Through 29-03-2018",
year = "2018",
month = may,
day = "11",
doi = "10.1109/ISISS.2018.8358133",
language = "英语",
series = "5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1--4",
booktitle = "5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018 - Proceedings",
}