Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films

T. Kobayashi; N. Makimoto; T. Oikawa; A. Wada; H. Funakubo; R. Maeda

doi:10.1109/MEMSYS.2013.6474266

Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films

T. Kobayashi
, N. Makimoto
, T. Oikawa
, A. Wada
, H. Funakubo
, R. Maeda

National Institute of Advanced Industrial Science and Technology
Institute of Science Tokyo

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Scopus citations

Abstract

We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr_0.3, Ti_0.7)O₃ (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d₃₁ of the tetra-PZT thin films have increased to 65.5 μC/Cm ², 20 V, and -42 pm/V by applying AC voltage of 80 V as 'wakeup' treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.

Original language	English
Title of host publication	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages	413-416
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474266
State	Published - 2013
Externally published	Yes
Event	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China Duration: 20 Jan 2013 → 24 Jan 2013

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/Territory	Taiwan, Province of China
City	Taipei
Period	20/01/13 → 24/01/13

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10.1109/MEMSYS.2013.6474266

Cite this

Kobayashi, T., Makimoto, N., Oikawa, T., Wada, A., Funakubo, H., & Maeda, R. (2013). Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 413-416). Article 6474266 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474266

@inproceedings{66afd1f178ad4ec9a1cb1c2f7799aaee,

title = "Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films",

abstract = "We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d31 of the tetra-PZT thin films have increased to 65.5 μC/Cm 2, 20 V, and -42 pm/V by applying AC voltage of 80 V as 'wakeup' treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.",

author = "T. Kobayashi and N. Makimoto and T. Oikawa and A. Wada and H. Funakubo and R. Maeda",

year = "2013",

doi = "10.1109/MEMSYS.2013.6474266",

language = "英语",

isbn = "9781467356558",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "413--416",

booktitle = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013",

note = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 ; Conference date: 20-01-2013 Through 24-01-2013",

}

Kobayashi, T, Makimoto, N, Oikawa, T, Wada, A, Funakubo, H & Maeda, R 2013, Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474266, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 413-416, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, Province of China, 20/01/13. https://doi.org/10.1109/MEMSYS.2013.6474266

Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films. / Kobayashi, T.; Makimoto, N.; Oikawa, T. et al.
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 413-416 6474266 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films

AU - Kobayashi, T.

AU - Makimoto, N.

AU - Oikawa, T.

AU - Wada, A.

AU - Funakubo, H.

AU - Maeda, R.

PY - 2013

Y1 - 2013

N2 - We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d31 of the tetra-PZT thin films have increased to 65.5 μC/Cm 2, 20 V, and -42 pm/V by applying AC voltage of 80 V as 'wakeup' treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.

AB - We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d31 of the tetra-PZT thin films have increased to 65.5 μC/Cm 2, 20 V, and -42 pm/V by applying AC voltage of 80 V as 'wakeup' treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.

UR - https://www.scopus.com/pages/publications/84875479950

U2 - 10.1109/MEMSYS.2013.6474266

DO - 10.1109/MEMSYS.2013.6474266

M3 - 会议稿件

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SN - 9781467356558

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 413

EP - 416

BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013

T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013

Y2 - 20 January 2013 through 24 January 2013

ER -

Kobayashi T, Makimoto N, Oikawa T, Wada A, Funakubo H, Maeda R. Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 413-416. 6474266. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2013.6474266

Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films

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