Lead zirconate titanate film formation technology with use of spray coating method

This paper presents a three-dimensional microfabrication and integration technology for MEMS smart materials that utilizes a spray coating method. Spray coating is shown to be most effective for additional deposition on non-planar surfaces. PZT films were formed both on flat and uneven surfaces at a thickness of about 1 μm. Perovskite structures were formed with suitable heat treatment and ferroelectric P-E hysteresis loop was also obtained. This paper is the first report from our group and other researchers on the deposition of smart materials for MEMS using a spray coating method. Spray coating has been proposed as an effective three-dimensional coating method which can be used to deposit piezoelectrics, pyroelectrics, magnetics, etc. for sensors and actuators. The hydrophilic and Hydrophobic properties between the substrate surface and ejected liquid are most essential process factors in the spray coating method for improving the film growth conditions.