Lead-Free piezoelectric diaphragm biosensors based on micro-machining technology and chemical solution deposition

Xiaomeng Li; Xiaoqing Wu; Peng Shi; Zuo Guang Ye

doi:10.3390/s16010069

Lead-Free piezoelectric diaphragm biosensors based on micro-machining technology and chemical solution deposition

Xiaomeng Li
, Xiaoqing Wu
, Peng Shi
, Zuo Guang Ye

Faculty of Electronic and Information Engineering

Xi'an Jiaotong University
Simon Fraser University

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN) composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/μg. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing.

Original language	English
Article number	69
Journal	Sensors (Switzerland)
Volume	16
Issue number	1
DOIs	https://doi.org/10.3390/s16010069
State	Published - 12 Jan 2016

Keywords

Chemical solution deposition
Lead-free
Piezoelectric diaphragm biosensor

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10.3390/s16010069

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title = "Lead-Free piezoelectric diaphragm biosensors based on micro-machining technology and chemical solution deposition",

abstract = "In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN) composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/μg. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing.",

keywords = "Chemical solution deposition, Lead-free, Piezoelectric diaphragm biosensor",

author = "Xiaomeng Li and Xiaoqing Wu and Peng Shi and Ye, \{Zuo Guang\}",

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AU - Li, Xiaomeng

AU - Wu, Xiaoqing

AU - Shi, Peng

AU - Ye, Zuo Guang

PY - 2016/1/12

Y1 - 2016/1/12

N2 - In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN) composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/μg. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing.

AB - In this paper, we present a new approach to the fabrication of integrated silicon-based piezoelectric diaphragm-type biosensors by using sodium potassium niobate-silver niobate (0.82KNN-0.18AN) composite lead-free thin film as the piezoelectric layer. The piezoelectric diaphragms were designed and fabricated by micro-machining technology and chemical solution deposition. The fabricated device was very sensitive to the mass changes caused by various targets attached on the surface of diaphragm. The measured mass sensitivity value was about 931 Hz/μg. Its good performance shows that the piezoelectric diaphragm biosensor can be used as a cost-effective platform for nucleic acid testing.

KW - Chemical solution deposition

KW - Lead-free

KW - Piezoelectric diaphragm biosensor

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ER -

Lead-Free piezoelectric diaphragm biosensors based on micro-machining technology and chemical solution deposition

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Keywords

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