Lead free 0.9Na1/2Bi1/2TiO3-0.1BaZr0.2Ti0.8O3thin film with large piezoelectric electrostrain

Hao Yang; Jinyan Zhao; Wei Ren; Zuo Guang Ye; K. B. Vinayakumar; Rosana A. Dias; Rui M.R. Pinto; Jian Zhuang; Nan Zhang

doi:10.1063/5.0106934

Lead free 0.9Na_1/2Bi_1/2TiO₃-0.1BaZr_0.2Ti_0.8O₃thin film with large piezoelectric electrostrain

Hao Yang
, Jinyan Zhao
, Wei Ren
, Zuo Guang Ye
, K. B. Vinayakumar
, Rosana A. Dias
, Rui M.R. Pinto
, Jian Zhuang
, Nan Zhang

Faculty of Electronic and Information Engineering

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

A sodium bismuth titanate-based thin film is widely investigated lead-free piezoelectrics with potential applications for modern micro-devices such as PiezoMEMS. In this work, a 0.9Na1/2Bi1/2TiO3-0.1BaZr0.2Ti0.8O3 thin film was deposited on a Pt/Ti/SiO2/Si (001) substrate by the sol-gel spin coating method. The deposited piezoelectric film shows low dielectric loss and high remnant polarization. The measured ferroelectricity loop showed a coercive field of 110 kV/cm and a saturation polarization of 46.83 μC/cm2. The piezoelectric response of this thin film does not decrease from room temperature to around 100 °C. The fabricated piezoelectric device with bottom and top electrodes showed a large macro-scale strain value of ∼4% under the DC (30 V) and AC voltages (f = 800 kHz, Vpp = 10 V).

Original language	English
Article number	132903
Journal	Applied Physics Letters
Volume	121
Issue number	13
DOIs	https://doi.org/10.1063/5.0106934
State	Published - 26 Sep 2022

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@article{d09fe0eafaf4426fae085f196dfd670e,

title = "Lead free 0.9Na1/2Bi1/2TiO3-0.1BaZr0.2Ti0.8O3thin film with large piezoelectric electrostrain",

abstract = "A sodium bismuth titanate-based thin film is widely investigated lead-free piezoelectrics with potential applications for modern micro-devices such as PiezoMEMS. In this work, a 0.9Na1/2Bi1/2TiO3-0.1BaZr0.2Ti0.8O3 thin film was deposited on a Pt/Ti/SiO2/Si (001) substrate by the sol-gel spin coating method. The deposited piezoelectric film shows low dielectric loss and high remnant polarization. The measured ferroelectricity loop showed a coercive field of 110 kV/cm and a saturation polarization of 46.83 μC/cm2. The piezoelectric response of this thin film does not decrease from room temperature to around 100 °C. The fabricated piezoelectric device with bottom and top electrodes showed a large macro-scale strain value of ∼4\% under the DC (30 V) and AC voltages (f = 800 kHz, Vpp = 10 V).",

author = "Hao Yang and Jinyan Zhao and Wei Ren and Ye, \{Zuo Guang\} and Vinayakumar, \{K. B.\} and Dias, \{Rosana A.\} and Pinto, \{Rui M.R.\} and Jian Zhuang and Nan Zhang",

note = "Publisher Copyright: {\textcopyright} 2022 Author(s).",

year = "2022",

month = sep,

day = "26",

doi = "10.1063/5.0106934",

language = "英语",

volume = "121",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

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TY - JOUR

T1 - Lead free 0.9Na1/2Bi1/2TiO3-0.1BaZr0.2Ti0.8O3thin film with large piezoelectric electrostrain

AU - Yang, Hao

AU - Zhao, Jinyan

AU - Ren, Wei

AU - Ye, Zuo Guang

AU - Vinayakumar, K. B.

AU - Dias, Rosana A.

AU - Pinto, Rui M.R.

AU - Zhuang, Jian

AU - Zhang, Nan

PY - 2022/9/26

Y1 - 2022/9/26

N2 - A sodium bismuth titanate-based thin film is widely investigated lead-free piezoelectrics with potential applications for modern micro-devices such as PiezoMEMS. In this work, a 0.9Na1/2Bi1/2TiO3-0.1BaZr0.2Ti0.8O3 thin film was deposited on a Pt/Ti/SiO2/Si (001) substrate by the sol-gel spin coating method. The deposited piezoelectric film shows low dielectric loss and high remnant polarization. The measured ferroelectricity loop showed a coercive field of 110 kV/cm and a saturation polarization of 46.83 μC/cm2. The piezoelectric response of this thin film does not decrease from room temperature to around 100 °C. The fabricated piezoelectric device with bottom and top electrodes showed a large macro-scale strain value of ∼4% under the DC (30 V) and AC voltages (f = 800 kHz, Vpp = 10 V).

AB - A sodium bismuth titanate-based thin film is widely investigated lead-free piezoelectrics with potential applications for modern micro-devices such as PiezoMEMS. In this work, a 0.9Na1/2Bi1/2TiO3-0.1BaZr0.2Ti0.8O3 thin film was deposited on a Pt/Ti/SiO2/Si (001) substrate by the sol-gel spin coating method. The deposited piezoelectric film shows low dielectric loss and high remnant polarization. The measured ferroelectricity loop showed a coercive field of 110 kV/cm and a saturation polarization of 46.83 μC/cm2. The piezoelectric response of this thin film does not decrease from room temperature to around 100 °C. The fabricated piezoelectric device with bottom and top electrodes showed a large macro-scale strain value of ∼4% under the DC (30 V) and AC voltages (f = 800 kHz, Vpp = 10 V).

UR - https://www.scopus.com/pages/publications/85139151295

U2 - 10.1063/5.0106934

DO - 10.1063/5.0106934

M3 - 文章

AN - SCOPUS:85139151295

SN - 0003-6951

VL - 121

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 13

M1 - 132903

ER -

Lead free 0.9Na_1/2Bi_1/2TiO₃-0.1BaZr_0.2Ti_0.8O₃thin film with large piezoelectric electrostrain

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