Lateral overgrowth of diamond film on stripes patterned Ir/HPHT-diamond substrate

Yan Feng Wang; Xiaohui Chang; Zhangcheng Liu; Zongchen Liu; Jiao Fu; Dan Zhao; Guoqing Shao; Juan Wang; Shaopeng Zhang; Yan Liang; Tianfei Zhu; Wei Wang; Hong Xing Wang

doi:10.1016/j.jcrysgro.2018.03.003

Lateral overgrowth of diamond film on stripes patterned Ir/HPHT-diamond substrate

Yan Feng Wang
, Xiaohui Chang
, Zhangcheng Liu
, Zongchen Liu
, Jiao Fu
, Dan Zhao
, Guoqing Shao
, Juan Wang
, Shaopeng Zhang
, Yan Liang
, Tianfei Zhu
, Wei Wang
, Hong Xing Wang

Faculty of Electronic and Information Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

Epitaxial lateral overgrowth (ELO) of diamond films on patterned Ir/(0 0 1)HPHT-diamond substrates have been carried out by microwave plasma CVD system. Ir/(0 0 1)HPHT-diamond substrates are fabricated by photolithographic and magnetron sputtering technique. The morphology of the as grown ELO diamond film is characterized by optical microscopy and scanning electronic microscopy. The quality and stress of the ELO diamond film are investigated by surface etching pit density and micro-Raman spectroscopy. Two ultraviolet photodetectors are fabricated on ELO diamond area and non-ELO diamond area prepared on same substrate, and that one on ELO diamond area indicates better photoelectric properties. All results indicate quality of ELO diamond film is improved.

Original language	English
Pages (from-to)	51-56
Number of pages	6
Journal	Journal of Crystal Growth
Volume	489
DOIs	https://doi.org/10.1016/j.jcrysgro.2018.03.003
State	Published - 1 May 2018

Keywords

Diamond
Dislocations
Etching pit
Iridium
Lateral overgrowth

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10.1016/j.jcrysgro.2018.03.003

Cite this

@article{12d92caf1da442808ecedffdd7347349,

title = "Lateral overgrowth of diamond film on stripes patterned Ir/HPHT-diamond substrate",

abstract = "Epitaxial lateral overgrowth (ELO) of diamond films on patterned Ir/(0 0 1)HPHT-diamond substrates have been carried out by microwave plasma CVD system. Ir/(0 0 1)HPHT-diamond substrates are fabricated by photolithographic and magnetron sputtering technique. The morphology of the as grown ELO diamond film is characterized by optical microscopy and scanning electronic microscopy. The quality and stress of the ELO diamond film are investigated by surface etching pit density and micro-Raman spectroscopy. Two ultraviolet photodetectors are fabricated on ELO diamond area and non-ELO diamond area prepared on same substrate, and that one on ELO diamond area indicates better photoelectric properties. All results indicate quality of ELO diamond film is improved.",

keywords = "Diamond, Dislocations, Etching pit, Iridium, Lateral overgrowth",

author = "Wang, \{Yan Feng\} and Xiaohui Chang and Zhangcheng Liu and Zongchen Liu and Jiao Fu and Dan Zhao and Guoqing Shao and Juan Wang and Shaopeng Zhang and Yan Liang and Tianfei Zhu and Wei Wang and Wang, \{Hong Xing\}",

note = "Publisher Copyright: {\textcopyright} 2018 Elsevier B.V.",

year = "2018",

month = may,

day = "1",

doi = "10.1016/j.jcrysgro.2018.03.003",

language = "英语",

volume = "489",

pages = "51--56",

journal = "Journal of Crystal Growth",

issn = "0022-0248",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Lateral overgrowth of diamond film on stripes patterned Ir/HPHT-diamond substrate

AU - Wang, Yan Feng

AU - Chang, Xiaohui

AU - Liu, Zhangcheng

AU - Liu, Zongchen

AU - Fu, Jiao

AU - Zhao, Dan

AU - Shao, Guoqing

AU - Wang, Juan

AU - Zhang, Shaopeng

AU - Liang, Yan

AU - Zhu, Tianfei

AU - Wang, Wei

AU - Wang, Hong Xing

PY - 2018/5/1

Y1 - 2018/5/1

N2 - Epitaxial lateral overgrowth (ELO) of diamond films on patterned Ir/(0 0 1)HPHT-diamond substrates have been carried out by microwave plasma CVD system. Ir/(0 0 1)HPHT-diamond substrates are fabricated by photolithographic and magnetron sputtering technique. The morphology of the as grown ELO diamond film is characterized by optical microscopy and scanning electronic microscopy. The quality and stress of the ELO diamond film are investigated by surface etching pit density and micro-Raman spectroscopy. Two ultraviolet photodetectors are fabricated on ELO diamond area and non-ELO diamond area prepared on same substrate, and that one on ELO diamond area indicates better photoelectric properties. All results indicate quality of ELO diamond film is improved.

AB - Epitaxial lateral overgrowth (ELO) of diamond films on patterned Ir/(0 0 1)HPHT-diamond substrates have been carried out by microwave plasma CVD system. Ir/(0 0 1)HPHT-diamond substrates are fabricated by photolithographic and magnetron sputtering technique. The morphology of the as grown ELO diamond film is characterized by optical microscopy and scanning electronic microscopy. The quality and stress of the ELO diamond film are investigated by surface etching pit density and micro-Raman spectroscopy. Two ultraviolet photodetectors are fabricated on ELO diamond area and non-ELO diamond area prepared on same substrate, and that one on ELO diamond area indicates better photoelectric properties. All results indicate quality of ELO diamond film is improved.

KW - Diamond

KW - Dislocations

KW - Etching pit

KW - Iridium

KW - Lateral overgrowth

UR - https://www.scopus.com/pages/publications/85043286972

U2 - 10.1016/j.jcrysgro.2018.03.003

DO - 10.1016/j.jcrysgro.2018.03.003

M3 - 文章

AN - SCOPUS:85043286972

SN - 0022-0248

VL - 489

SP - 51

EP - 56

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

ER -

Lateral overgrowth of diamond film on stripes patterned Ir/HPHT-diamond substrate

Abstract

Keywords

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