Laser confocal positioning super-oscillatory optical microscopy

Optical superoscillation technologies have been successfully used to realize far-field sub-diffraction focusing, super-resolution imaging and nano metrology. A transmission-mode super-oscillatory super-resolution optical microscope has been built, in which both the best focal plane of super-oscillatory lens (SOL) and the sample to be imaged can be accurately positioned by the laser confocal detection method. The sub-diffraction focusing and super-resolution imaging experiments have been carried out based on a SOL with a diameter of 3 mm and a focal length of 0.8 mm. The developed super-oscillatory super-resolution optical microscope can be practically used in high-resolution scanning imaging of 2D thin subwavelength microstructures.