Large-scale high quality glass microlens arrays fabricated by laser enhanced wet etching

Large-scale high quality microlens arrays (MLAs) play an important role in enhancing the imaging quality of CCD and CMOS as well as the light extraction efficiency of LEDs and OLEDs. To meet the requirement in MLAs' wide application areas, a rapid fabrication method to fabricate large-scale MLAs with high quality, high fill factor and high uniformity is needed, especially on the glass substrate. In this paper, we present a simple and cost-efficient approach to the development of both concave and convex large-scale microlens arrays (MLAs) by using femtosecond laser wet etching method and replication technique. A largescale high quality square-shaped microlens array with 512 × 512 units was fabricated.The unit size is 20 × 20 μm² on the whole scale of 1 × 1 cm². Its perfect uniformity and optical performance are demonstrated.