Kirigami-Cut Pattern Designs for the Enhancement of Sensing Performance Induced by Programmable Out-of-Plane Deformation

Kirigami meta-structures are popular for their excellent mechanical properties including high stretchability, multi-stable states and programmable deformation. Recent studies have integrated sensing material with kirigami meta-structure to develop strain sensor with high stretchability or good surface conformability. This study reports on three types of kirigami patterns, and utilizes the programmable out-of-plane displacements of kirigami meta-structure in couple with polyvinylidene fluoride (PVDF) film to construct piezoelectric pressure sensor with enhanced sensing performance, such as sensitivity and output voltage. The basic kirigami patterns and the parameter design methods are discussed. Then, the kirigami pattern is fabricated on PVDF films using nanosecond-pulse ultraviolet laser in couple with craft. Experimental results in combination with simulation analysis confirm the deformation characteristics of kirigami-cut PVDF. Finally, the deformed kirigami-cut PVDF is embedded into polydimethylsiloxane (PDMS) to construct piezoelectric pressure sensor, output signal measurements confirm enhanced sensing output compared to sensors implanted with un-deformed kirigami-cut PVDF, with an increase of approximately 1.76 times. Theoretical analysis reveals the improvement of force transmission efficiency induced by deformed kirigami-cut structure. The study findings validate the potential of kirigami meta-structures as a scalable and versatile foundation for next-generation pressure sensor design.