Abstract
Metallo-organic decomposition method (MOD) derived lead lanthanum titanate(PLT) thin films were fired by rapid thermal annealing (RTA) and conventional furnace annealing (CFA) process, respectively. Morphologies of PLT films with different thickness were observed by a scanning electron microscopy (SEM). SEM results revealed that RTA process is favorable for crystillization and densification of thinner films, but CFA process is suitable for that of films with various thickness. Formation mechanism of MOD derived PLT thin films is similar to that of sputtering PLT thin films, which has a mechanism of nucleation controlled growth.
| Original language | English |
|---|---|
| Pages (from-to) | 147-152 |
| Number of pages | 6 |
| Journal | Ferroelectrics |
| Volume | 232 |
| Issue number | 1-4 |
| DOIs | |
| State | Published - 1999 |
Keywords
- Crystillization
- Formation mechanism
- Lead lanthanum titanate
- Morphologies
- Nucleation controlled growth