@inproceedings{2a2e79ef85d34bc6b511a627f4f7d9d0,
title = "Investigation on femtosecond laser-assisted microfabrication in silica glasses",
abstract = "Fabrication of microstructures embedded in silica glasses using a femtosecond (fs)-laser-assisted chemical etching technique is systematically studied in this work. By scanning the laser pulses inside samples followed by the treatment of 5\%-diluted hydrofluoric (HF) acid, groups of straight channels are fabricated and the relationship between the etching rate and processing parameters, including laser power, scanning speed, scanning time and laser polarization, is demonstrated. Based on the optimization of these parameters, complicated microstructures such as channels, cavities and their combinations are manufactured. The work has great potential applications in microelectromechanical systems, biomedical detection and chemical analysis.",
keywords = "chemical etching, femtosecond laser, microfabrication, microstructure, silica glass",
author = "Hewei Liu and Feng Chen and Qing Yang and Jinhai Si and Xun Hou",
year = "2010",
doi = "10.1117/12.869845",
language = "英语",
isbn = "9780819483737",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "High-Power Lasers and Applications V",
note = "High-Power Lasers and Applications V ; Conference date: 18-10-2010 Through 19-10-2010",
}