Investigation of the occupancy ratio dependence for microlens arrays on diamond

Tian Fei Zhu; Jiao Fu; Zongchen Liu; Yan Liang; Wei Wang; Feng Wen; Jingwen Zhang; Hong Xing Wang

doi:10.1039/c8ra03803a

Investigation of the occupancy ratio dependence for microlens arrays on diamond

Tian Fei Zhu
, Jiao Fu
, Zongchen Liu
, Yan Liang
, Wei Wang
, Feng Wen
, Jingwen Zhang
, Hong Xing Wang

Faculty of Electronic and Information Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

Diamond microlens arrays with a high occupancy ratio were fabricated by an improved thermal reflow method. Our resultes show that the occupancy ratio of a photoresist mask could be improved with optimizing the reflow temperature, time and photoresist thickness during the reflow process. The fabricated microlens arrays exhibited a uniform arrangement and good optical performance.

Original language	English
Pages (from-to)	29544-29547
Number of pages	4
Journal	RSC Advances
Volume	8
Issue number	52
DOIs	https://doi.org/10.1039/c8ra03803a
State	Published - 2018

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10.1039/c8ra03803a

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@article{468a538ec62743759e4afad826720484,

title = "Investigation of the occupancy ratio dependence for microlens arrays on diamond",

abstract = "Diamond microlens arrays with a high occupancy ratio were fabricated by an improved thermal reflow method. Our resultes show that the occupancy ratio of a photoresist mask could be improved with optimizing the reflow temperature, time and photoresist thickness during the reflow process. The fabricated microlens arrays exhibited a uniform arrangement and good optical performance.",

author = "Zhu, \{Tian Fei\} and Jiao Fu and Zongchen Liu and Yan Liang and Wei Wang and Feng Wen and Jingwen Zhang and Wang, \{Hong Xing\}",

note = "Publisher Copyright: {\textcopyright} 2018 The Royal Society of Chemistry.",

year = "2018",

doi = "10.1039/c8ra03803a",

language = "英语",

volume = "8",

pages = "29544--29547",

journal = "RSC Advances",

issn = "2046-2069",

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TY - JOUR

T1 - Investigation of the occupancy ratio dependence for microlens arrays on diamond

AU - Zhu, Tian Fei

AU - Fu, Jiao

AU - Liu, Zongchen

AU - Liang, Yan

AU - Wang, Wei

AU - Wen, Feng

AU - Zhang, Jingwen

AU - Wang, Hong Xing

PY - 2018

Y1 - 2018

N2 - Diamond microlens arrays with a high occupancy ratio were fabricated by an improved thermal reflow method. Our resultes show that the occupancy ratio of a photoresist mask could be improved with optimizing the reflow temperature, time and photoresist thickness during the reflow process. The fabricated microlens arrays exhibited a uniform arrangement and good optical performance.

AB - Diamond microlens arrays with a high occupancy ratio were fabricated by an improved thermal reflow method. Our resultes show that the occupancy ratio of a photoresist mask could be improved with optimizing the reflow temperature, time and photoresist thickness during the reflow process. The fabricated microlens arrays exhibited a uniform arrangement and good optical performance.

UR - https://www.scopus.com/pages/publications/85052562402

U2 - 10.1039/c8ra03803a

DO - 10.1039/c8ra03803a

M3 - 文章

AN - SCOPUS:85052562402

SN - 2046-2069

VL - 8

SP - 29544

EP - 29547

JO - RSC Advances

JF - RSC Advances

IS - 52

ER -

Investigation of the occupancy ratio dependence for microlens arrays on diamond

Abstract

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