Investigation of electrohydrodynamic patterning of micro structures at room temperature

EHD (Electrohydrodynamic) patterning forming micro structures with UV light curable materials at room temperature is investigated in this paper. It is a process for fabricating patterns on polymer film by applying electrical field to the template and the substrate as an electrode pair. The maintaining time of EHD patterning is reduced from several hours to tens of minutes by using UV curable polymer with low viscosity. The flat template generates the periodic pillars with micro scale. The periodic pillars with different period are obtained by varying the applied voltage in the different phase of experiment. The micro scale replication with good fidelity is produced by using patterned template made of doped silicon wafer.