@inbook{1bc48e4e7c60486fa588320e1c47bb50,
title = "Introduction to Precision Machines",
abstract = "Ultra-precision machining is an advanced technology used to generate parts with high accuracy, low surface roughness and surface/subsurface damage to meet the requirements of astronomy, semiconductor technology, consumer electronics, etc. The application in some representative fields was described to clarify the concrete requirements for ultra-precision machining. The state of the art of three widely used ultra-precision machining processes including ultra-precision cutting, ultra-precision grinding and finishing/figuring is discussed.",
keywords = "Manufacturing, Measurement, Precision machines",
author = "Shuming Yang and Guofeng Zhang and Changsheng Li and Zhuangde Jiang",
note = "Publisher Copyright: {\textcopyright} Springer Nature Singapore Pte Ltd. 2020.",
year = "2020",
doi = "10.1007/978-981-13-0381-4\_1",
language = "英语",
series = "Precision Manufacturing",
publisher = "Springer",
pages = "1--32",
booktitle = "Precision Manufacturing",
}