Interfacial and microstructural properties of SrTiO3 thin films grown on Si(001) substrates

J. Q. He; S. Regnery; C. L. Jia; Y. L. Qin; F. Fitsilis; P. Ehrhart; R. Waser; K. Urban; R. H. Wang

doi:10.1063/1.1522475

Interfacial and microstructural properties of SrTiO₃ thin films grown on Si(001) substrates

J. Q. He
, S. Regnery
, C. L. Jia
, Y. L. Qin
, F. Fitsilis
, P. Ehrhart
, R. Waser
, K. Urban
, R. H. Wang

Research output: Contribution to journal › Article › peer-review

31 Scopus citations

Abstract

The interfacial and microstructural properties of SrTiO₃ thin films grown on Si(001) substrates was studied by using high-resolution transmission electron microscopy. The thickness of the interfacial layer was found to increase with the oxygen partial pressure during deposition. The results showed that the thickness increased rapidly which was faster with respect to the corresponding growth of amorphous SiO₂ in the absence of precursors.

Original language	English
Pages (from-to)	7200-7205
Number of pages	6
Journal	Journal of Applied Physics
Volume	92
Issue number	12
DOIs	https://doi.org/10.1063/1.1522475
State	Published - 15 Dec 2002
Externally published	Yes

Access to Document

10.1063/1.1522475

Cite this

@article{4a2a4d031b8541b48f15051eaf6256d1,

title = "Interfacial and microstructural properties of SrTiO3 thin films grown on Si(001) substrates",

abstract = "The interfacial and microstructural properties of SrTiO3 thin films grown on Si(001) substrates was studied by using high-resolution transmission electron microscopy. The thickness of the interfacial layer was found to increase with the oxygen partial pressure during deposition. The results showed that the thickness increased rapidly which was faster with respect to the corresponding growth of amorphous SiO2 in the absence of precursors.",

author = "He, \{J. Q.\} and S. Regnery and Jia, \{C. L.\} and Qin, \{Y. L.\} and F. Fitsilis and P. Ehrhart and R. Waser and K. Urban and Wang, \{R. H.\}",

year = "2002",

month = dec,

day = "15",

doi = "10.1063/1.1522475",

language = "英语",

volume = "92",

pages = "7200--7205",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "12",

}

TY - JOUR

T1 - Interfacial and microstructural properties of SrTiO3 thin films grown on Si(001) substrates

AU - He, J. Q.

AU - Regnery, S.

AU - Jia, C. L.

AU - Qin, Y. L.

AU - Fitsilis, F.

AU - Ehrhart, P.

AU - Waser, R.

AU - Urban, K.

AU - Wang, R. H.

PY - 2002/12/15

Y1 - 2002/12/15

N2 - The interfacial and microstructural properties of SrTiO3 thin films grown on Si(001) substrates was studied by using high-resolution transmission electron microscopy. The thickness of the interfacial layer was found to increase with the oxygen partial pressure during deposition. The results showed that the thickness increased rapidly which was faster with respect to the corresponding growth of amorphous SiO2 in the absence of precursors.

AB - The interfacial and microstructural properties of SrTiO3 thin films grown on Si(001) substrates was studied by using high-resolution transmission electron microscopy. The thickness of the interfacial layer was found to increase with the oxygen partial pressure during deposition. The results showed that the thickness increased rapidly which was faster with respect to the corresponding growth of amorphous SiO2 in the absence of precursors.

UR - https://www.scopus.com/pages/publications/0037115575

U2 - 10.1063/1.1522475

DO - 10.1063/1.1522475

M3 - 文章

AN - SCOPUS:0037115575

SN - 0021-8979

VL - 92

SP - 7200

EP - 7205

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 12

ER -

Interfacial and microstructural properties of SrTiO₃ thin films grown on Si(001) substrates

Abstract

Access to Document

Other files and links

Fingerprint

Cite this