Insulating Films on Semiconductors (INFOS 2017)

Research output: Contribution to journal › Editorial

Original language	English
Pages (from-to)	A1
Journal	Microelectronic Engineering
Volume	178
DOIs	https://doi.org/10.1016/j.mee.2017.06.001
State	Published - 25 Jun 2017

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@article{f263973d0b384702b2472f13d159da0e,

title = "Insulating Films on Semiconductors (INFOS 2017)",

author = "Jarek D{\c a}browski and Gang Niu and Christian Wenger",

year = "2017",

month = jun,

day = "25",

doi = "10.1016/j.mee.2017.06.001",

language = "英语",

volume = "178",

pages = "A1",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Insulating Films on Semiconductors (INFOS 2017)

AU - Dąbrowski, Jarek

AU - Niu, Gang

AU - Wenger, Christian

PY - 2017/6/25

Y1 - 2017/6/25

UR - https://www.scopus.com/pages/publications/85020821941

U2 - 10.1016/j.mee.2017.06.001

DO - 10.1016/j.mee.2017.06.001

M3 - 社论

AN - SCOPUS:85020821941

SN - 0167-9317

VL - 178

SP - A1

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -