Injection molding, debinding and sintering of 316L stainless steel microstructures

G. Fu; N. H. Loh; S. B. Tor; B. Y. Tay; Y. Murakoshi; R. Maeda

doi:10.1007/s00339-005-3273-6

Injection molding, debinding and sintering of 316L stainless steel microstructures

G. Fu
, N. H. Loh
, S. B. Tor
, B. Y. Tay
, Y. Murakoshi
, R. Maeda

Nanyang Technological University
Agency for Science, Technology and Research, Singapore
National Institute of Advanced Industrial Science and Technology

Research output: Contribution to journal › Article › peer-review

56 Scopus citations

Abstract

The micro powder injection molding (μPIM) process was used to fabricate metallic microstructures in this paper. The production of 316L stainless steel microstructures arrays with the dimensions of ø 100 μm×height200 μm and ø 60 μm × height 191 μm is presented. Injection molding was conducted on a conventional injection molding machine and silicon mold inserts with vertical sidewall made by deep reactive ion etching (DRIE) were used. Molded parts with microstructures were well obtained after selecting suitable processing parameters based on the feedstock characteristics. Then the molded parts were debound catalytically and sintered. Sintering at different temperature was conducted under vacuum. The effects of sintering temperatures were evaluated based on the polished and etched micrographs of the sintered microstructures. Finally Young's Modulus of sintered microstructure was evaluated using nano-indenter.

Original language	English
Pages (from-to)	495-500
Number of pages	6
Journal	Applied Physics A: Materials Science and Processing
Volume	81
Issue number	3
DOIs	https://doi.org/10.1007/s00339-005-3273-6
State	Published - Aug 2005
Externally published	Yes

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title = "Injection molding, debinding and sintering of 316L stainless steel microstructures",

abstract = "The micro powder injection molding (μPIM) process was used to fabricate metallic microstructures in this paper. The production of 316L stainless steel microstructures arrays with the dimensions of {\o} 100 μm×height200 μm and {\o} 60 μm × height 191 μm is presented. Injection molding was conducted on a conventional injection molding machine and silicon mold inserts with vertical sidewall made by deep reactive ion etching (DRIE) were used. Molded parts with microstructures were well obtained after selecting suitable processing parameters based on the feedstock characteristics. Then the molded parts were debound catalytically and sintered. Sintering at different temperature was conducted under vacuum. The effects of sintering temperatures were evaluated based on the polished and etched micrographs of the sintered microstructures. Finally Young's Modulus of sintered microstructure was evaluated using nano-indenter.",

author = "G. Fu and Loh, \{N. H.\} and Tor, \{S. B.\} and Tay, \{B. Y.\} and Y. Murakoshi and R. Maeda",

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AU - Fu, G.

AU - Loh, N. H.

AU - Tor, S. B.

AU - Tay, B. Y.

AU - Murakoshi, Y.

AU - Maeda, R.

PY - 2005/8

Y1 - 2005/8

N2 - The micro powder injection molding (μPIM) process was used to fabricate metallic microstructures in this paper. The production of 316L stainless steel microstructures arrays with the dimensions of ø 100 μm×height200 μm and ø 60 μm × height 191 μm is presented. Injection molding was conducted on a conventional injection molding machine and silicon mold inserts with vertical sidewall made by deep reactive ion etching (DRIE) were used. Molded parts with microstructures were well obtained after selecting suitable processing parameters based on the feedstock characteristics. Then the molded parts were debound catalytically and sintered. Sintering at different temperature was conducted under vacuum. The effects of sintering temperatures were evaluated based on the polished and etched micrographs of the sintered microstructures. Finally Young's Modulus of sintered microstructure was evaluated using nano-indenter.

AB - The micro powder injection molding (μPIM) process was used to fabricate metallic microstructures in this paper. The production of 316L stainless steel microstructures arrays with the dimensions of ø 100 μm×height200 μm and ø 60 μm × height 191 μm is presented. Injection molding was conducted on a conventional injection molding machine and silicon mold inserts with vertical sidewall made by deep reactive ion etching (DRIE) were used. Molded parts with microstructures were well obtained after selecting suitable processing parameters based on the feedstock characteristics. Then the molded parts were debound catalytically and sintered. Sintering at different temperature was conducted under vacuum. The effects of sintering temperatures were evaluated based on the polished and etched micrographs of the sintered microstructures. Finally Young's Modulus of sintered microstructure was evaluated using nano-indenter.

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EP - 500

JO - Applied Physics A: Materials Science and Processing

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IS - 3

ER -

Injection molding, debinding and sintering of 316L stainless steel microstructures

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