Influence of spindle rotating speed on machining quality for chips of semiconductor

Based on the facts that the organic material constituted substrates extensively and the copper substrate was used less, two experiments were established and done. After these chips were examined in dominating estimating items, the results indicate influences of the spindle rotating speed on the chips in the field, such as error of size, trumpet-like, angle error of cut section, chipping and surface roughness. From that, we can find that the chipping is the mostly cause inducing disqualification. Through analyses and comparisons, it is concluded that the applied rotating speed of spindle must be more than 1500r/min. The conclusion is valuable for design of high-speed dicing and making cutting process.