@inproceedings{b927b77797f14eea99ff5c55279c1d07,
title = "Influence of Magnetron Sputtering Parameters on Heat Volatilization Property of Tungsten-Rhenium Thin Film Thermocouples",
abstract = "The working time of tungsten-rhenium (W-Re) thin film thermocouples (TFTCs) is reduced for the reason of heat volatilization under non oxidizing environment. Influence of magnetron sputtering parameters on thermal volatilization property of tungsten-rhenium TFTCs were discussed by aging test and scanning electron microscope (SEM) test. We used different gas flow rate, sputtering power and the vacuum degree to make 9 samples of TFTCs film. The aging experiment showed that the suitable magnetron sputtering parameters can reduce the heat volatilization rate to 46.5nm/h.",
keywords = "Seececk, TFTCs, magnetron sputtering",
author = "Bian Tian and Zhongkai Zhang and Zhe Du and Qiuyue Yu and Qijing Lin and Na Zhao and Zhuangde Jiang",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2018 ; Conference date: 22-04-2018 Through 26-04-2018",
year = "2018",
month = dec,
day = "3",
doi = "10.1109/NEMS.2018.8556877",
language = "英语",
series = "NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "649--652",
booktitle = "NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
}