Influence of liquid environments on femtosecond laser ablation of silicon

Liquid-assisted ablation of solids by femtosecond laser pulses has proved to be an efficient tool for highly precise microfabrication, which evokes numerous research interests in recent years. In this paper, we systematically investigate the interaction of femtosecond laser pulses with silicon wafer in water, alcohol, and as a comparison, in air. After producing a series of multiple-shot craters on a silicon wafer in the three types of environments, surface morphologies and femtosecond laser-induced periodic surface structures are comparatively studied via the scanning electron microscope investigations. Meanwhile, the influence of liquid mediums on ablation threshold fluence and ablation depth is also numerically analyzed. The experimental results indicate that the ablation threshold fluences of silicon are reduced by the presence of liquids (water/alcohol) and ablation depths of craters are deepened in ambient water. Furthermore, smoother surfaces tend to be obtained in alcohol-mediated ablation at smaller shot numbers. Finally, the evolution of the femtosecond laser-induced periodic surface structures in air, water and alcohol is also discussed.