Abstract
The gate oxide interface state of SiC MOSFET is the main factor that affects the high temperature reliability of the device. Therefore, the high temperature reliability test of planar gate depleted 1200V20A SiC MOSFET is carried out in this paper. The relationship between leakage current and temperature is studied by comparing the change process of leakage current and temperature in the initial stage of high temperature gate bias and high temperature reverse bias. After the HTGB and HTRB test, the threshold voltage and on resistance are measured at room temperature. The influence of the HTGB test and HTRB test on device parameters is further analyzed, and the relationship between them is revealed.
| Original language | English |
|---|---|
| Article number | 012096 |
| Journal | Journal of Physics: Conference Series |
| Volume | 2033 |
| Issue number | 1 |
| DOIs | |
| State | Published - 5 Oct 2021 |
| Event | 3rd International Conference on Electrical, Communication and Computer Engineering, ICECCE 2021 - Kuala Lumpur, Virtual, Malaysia Duration: 12 Jun 2021 → 13 Jun 2021 |
Keywords
- High temperature reliability test
- HTGB
- HTRB
- SiC MOSFET
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