TY - JOUR
T1 - Influence of annealing temperature on thermal stability and tribological properties of diamond-like carbon coatings
AU - Zeng, Qunfeng
AU - Liu, Guan
AU - Peng, Runling
AU - Dong, Guangneng
AU - Xu, Feiyan
N1 - Publisher Copyright:
©, 2015, Science Press. All right reserved.
PY - 2015/5/1
Y1 - 2015/5/1
N2 - The diamond-like carbon (DLC) thin films, deposited on substrates of SiC balls and high speed steel discs by unbalanced magnetron sputtering, were annealed in ambient environment. The impact of the annealing temperature on the microstructures, thermal stability and tribological behavior of the DLC coatings was investigated with metallographic microscope, Raman spectroscopy, and conventional mechanical probes. The results show that the annealing temperature significantly affects the microstructures, thermal stability and tribological property of the DLC coatings. To be specific, as the annealing temperature increased, the sp3-C bond rapidly turned into sp2-C bond, and the friction coefficient and wear-rate changed in an increase-decrease mode, being the lowest at 400oC. Annealed at 600℃, a significant diamond-to-graphite transition occurred. In the wear tracks, the SiC scraps observed in the wear tracks possibly account for the reduction of both the friction coefficient and wear rate.
AB - The diamond-like carbon (DLC) thin films, deposited on substrates of SiC balls and high speed steel discs by unbalanced magnetron sputtering, were annealed in ambient environment. The impact of the annealing temperature on the microstructures, thermal stability and tribological behavior of the DLC coatings was investigated with metallographic microscope, Raman spectroscopy, and conventional mechanical probes. The results show that the annealing temperature significantly affects the microstructures, thermal stability and tribological property of the DLC coatings. To be specific, as the annealing temperature increased, the sp3-C bond rapidly turned into sp2-C bond, and the friction coefficient and wear-rate changed in an increase-decrease mode, being the lowest at 400oC. Annealed at 600℃, a significant diamond-to-graphite transition occurred. In the wear tracks, the SiC scraps observed in the wear tracks possibly account for the reduction of both the friction coefficient and wear rate.
KW - Annealing temperature
KW - Diamond-like carbon films
KW - Raman spectra
KW - Tribological properties
UR - https://www.scopus.com/pages/publications/84930518861
U2 - 10.13922/j.cnki.cjovst.2015.05.16
DO - 10.13922/j.cnki.cjovst.2015.05.16
M3 - 文章
AN - SCOPUS:84930518861
SN - 1672-7126
VL - 35
SP - 601
EP - 607
JO - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
JF - Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
IS - 5
ER -