@inproceedings{6197f4d2edb24626a97a97baac95618b,
title = "Improved the anti-reflection performance and stability of hierarchical micro-nano hybrid structures by annealing method",
abstract = "The stability and durability of micro-nano structures is the key to influence the structural materials surface towards practical engineering applications. In this paper, the stability of micro-nano structures fabricated by femtosecond laser is systematically studied. It is found that the hierarchical micro-nano hybrid structures seriously affect absorbing properties and stability of the material surface due to the poor crystallinity. In order to enhance efficient optical absorption and stability, the annealing method is applied to further crystallization of the micro-nano structures. As a result, hierarchical micro-nano hybrid structures with large depth-to-width ratios are fabricated. The experimental results demonstrate that an average reflectance of 3.43\% is realized in the waveband of 300-2400 nm, and the reduction rate of the reflectance reaches 39.6\%. Meanwhile, the water jet impact experiment verifies that the stability of the structure is further improved.",
keywords = "Annealing, Anti-reflection, Femtosecond laser, Hierarchical micro-nano hybrid structure, Stability",
author = "Tong Chen and Wenjun Wang and Jue Qu and Aifei Pan and Xuesong Mei",
note = "Publisher Copyright: {\textcopyright} 2024 SPIE.; 19th National Conference on Laser Technology and Optoelectronics ; Conference date: 21-06-2024 Through 24-06-2024",
year = "2024",
doi = "10.1117/12.3037853",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Qiang Liu",
booktitle = "Nineteenth National Conference on Laser Technology and Optoelectronics",
}