Improved irradiation tolerance of W thin films with homogeneously multilayered structure

  • M. J. Peng
  • , J. J. Yang
  • , F. F. Zhang
  • , C. Y. Lu
  • , L. M. Wang
  • , J. L. Liao
  • , Y. Y. Yang
  • , N. Liu

Research output: Contribution to journalArticlepeer-review

7 Scopus citations

Abstract

We report an improved irradiation tolerance of W films by utilizing homogeneously multilayered (HM) structure design. The HM-W film was fabricated by multi-step sputtering, in which the grain boundary density λ could be increased by decreasing the individual layer thickness Pm of the film. The HM structure can improve the film irradiation resistance, in which both He bubble density ρ and average size δ continuously decreased with decreasing Pm. Meanwhile, the irradiation hardening was alleviated by decreasing Pm, while the irradiation-induced phase transition was insensitive to Pm. Our study could provide a promising way to modify the structures of thin films to promote their irradiation resistance.

Original languageEnglish
Pages (from-to)230-235
Number of pages6
JournalSurface and Coatings Technology
Volume313
DOIs
StatePublished - 15 Mar 2017
Externally publishedYes

Keywords

  • Irradiation
  • Magnetron sputtering
  • Multilayer
  • W film

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