Impact of Manufacturing Variation on the Performance of Coupled Micro Resonator Array for Mass Detection Sensor

Nor Hayati Saad; Xueyong Wei; Carl Anthony; Hossein Ostadi; Raya Al-Dadah; Michael C.L. Ward

doi:10.1016/j.proche.2009.07.207

Impact of Manufacturing Variation on the Performance of Coupled Micro Resonator Array for Mass Detection Sensor

Nor Hayati Saad
, Xueyong Wei
, Carl Anthony
, Hossein Ostadi
, Raya Al-Dadah
, Michael C.L. Ward

University of Birmingham

Research output: Contribution to journal › Conference article › peer-review

7 Scopus citations

Abstract

Manufacturing variation in MEMS is inevitable due to the nature of the fabrication processes. We quantify the variations and analyze its effect on the performance of a constant CMRA sensor. Finite element analysis was used to verify the effective mass and stiffness of the structure and overall performance was analyzed using lumped mass parameter model. From the results we found that the variations may cause some reduction on the CMRA performance. However, the variations may naturally stagger the mass of the constant CMRA to produce unique output signals with which any mass changes should be able to be detected.

Original language	English
Pages (from-to)	831-834
Number of pages	4
Journal	Procedia Chemistry
Volume	1
Issue number	1
DOIs	https://doi.org/10.1016/j.proche.2009.07.207
State	Published - Sep 2009
Externally published	Yes
Event	Eurosensors 23rd Conference - Lausanne, Switzerland Duration: 6 Sep 2009 → 9 Sep 2009

Keywords

FEA and lumped mass analysis
Manufacturing variation
constant coupled resonators
mass sensor
variation quantification

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10.1016/j.proche.2009.07.207

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title = "Impact of Manufacturing Variation on the Performance of Coupled Micro Resonator Array for Mass Detection Sensor",

abstract = "Manufacturing variation in MEMS is inevitable due to the nature of the fabrication processes. We quantify the variations and analyze its effect on the performance of a constant CMRA sensor. Finite element analysis was used to verify the effective mass and stiffness of the structure and overall performance was analyzed using lumped mass parameter model. From the results we found that the variations may cause some reduction on the CMRA performance. However, the variations may naturally stagger the mass of the constant CMRA to produce unique output signals with which any mass changes should be able to be detected.",

keywords = "FEA and lumped mass analysis, Manufacturing variation, constant coupled resonators, mass sensor, variation quantification",

author = "Saad, \{Nor Hayati\} and Xueyong Wei and Carl Anthony and Hossein Ostadi and Raya Al-Dadah and Ward, \{Michael C.L.\}",

year = "2009",

month = sep,

doi = "10.1016/j.proche.2009.07.207",

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journal = "Procedia Chemistry",

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T1 - Impact of Manufacturing Variation on the Performance of Coupled Micro Resonator Array for Mass Detection Sensor

AU - Saad, Nor Hayati

AU - Wei, Xueyong

AU - Anthony, Carl

AU - Ostadi, Hossein

AU - Al-Dadah, Raya

AU - Ward, Michael C.L.

PY - 2009/9

Y1 - 2009/9

N2 - Manufacturing variation in MEMS is inevitable due to the nature of the fabrication processes. We quantify the variations and analyze its effect on the performance of a constant CMRA sensor. Finite element analysis was used to verify the effective mass and stiffness of the structure and overall performance was analyzed using lumped mass parameter model. From the results we found that the variations may cause some reduction on the CMRA performance. However, the variations may naturally stagger the mass of the constant CMRA to produce unique output signals with which any mass changes should be able to be detected.

AB - Manufacturing variation in MEMS is inevitable due to the nature of the fabrication processes. We quantify the variations and analyze its effect on the performance of a constant CMRA sensor. Finite element analysis was used to verify the effective mass and stiffness of the structure and overall performance was analyzed using lumped mass parameter model. From the results we found that the variations may cause some reduction on the CMRA performance. However, the variations may naturally stagger the mass of the constant CMRA to produce unique output signals with which any mass changes should be able to be detected.

KW - FEA and lumped mass analysis

KW - Manufacturing variation

KW - constant coupled resonators

KW - mass sensor

KW - variation quantification

UR - https://www.scopus.com/pages/publications/71549115433

U2 - 10.1016/j.proche.2009.07.207

DO - 10.1016/j.proche.2009.07.207

M3 - 会议文章

AN - SCOPUS:71549115433

SN - 1876-6196

VL - 1

SP - 831

EP - 834

JO - Procedia Chemistry

JF - Procedia Chemistry

IS - 1

T2 - Eurosensors 23rd Conference

Y2 - 6 September 2009 through 9 September 2009

ER -

Impact of Manufacturing Variation on the Performance of Coupled Micro Resonator Array for Mass Detection Sensor

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Keywords

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