Highly integrated ultra-sensitive silicon disk micro resonator for trace amount of chemicals detection

J. Lu; T. Suga; Y. Zhang; T. Itoh; R. Maeda; T. Mihara

doi:10.1109/ICSENS.2009.5398170

Highly integrated ultra-sensitive silicon disk micro resonator for trace amount of chemicals detection

J. Lu
, T. Suga
, Y. Zhang
, T. Itoh
, R. Maeda
, T. Mihara

The University of Tokyo
National Institute of Advanced Industrial Science and Technology
Olympus Corporation

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Highly integrated silicon disk micro resonator with excellent quality factor, 1319 in air, was developed in this work for trace amount of chemicals detection. On resonator integrated piezoelectric PZT thin film enables low driving voltage (∼0.2V), good impedance matching with ICs and self actuation self sensing capability. The energy dissipation and other negative effects from PZT electrode stack were successfully compressed by refining the resonator's geometry. The proposed resonator is promising to wireless sensor network for human healthcare applications.

Original language	English
Title of host publication	IEEE Sensors 2009 Conference - SENSORS 2009
Pages	266-269
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2009.5398170
State	Published - 2009
Externally published	Yes
Event	IEEE Sensors 2009 Conference - SENSORS 2009 - Christchurch, New Zealand Duration: 25 Oct 2009 → 28 Oct 2009

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	IEEE Sensors 2009 Conference - SENSORS 2009
Country/Territory	New Zealand
City	Christchurch
Period	25/10/09 → 28/10/09

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being

Access to Document

10.1109/ICSENS.2009.5398170

Cite this

@inproceedings{5651c1449a794538be0a78aab1d1419e,

title = "Highly integrated ultra-sensitive silicon disk micro resonator for trace amount of chemicals detection",

abstract = "Highly integrated silicon disk micro resonator with excellent quality factor, 1319 in air, was developed in this work for trace amount of chemicals detection. On resonator integrated piezoelectric PZT thin film enables low driving voltage (∼0.2V), good impedance matching with ICs and self actuation self sensing capability. The energy dissipation and other negative effects from PZT electrode stack were successfully compressed by refining the resonator's geometry. The proposed resonator is promising to wireless sensor network for human healthcare applications.",

author = "J. Lu and T. Suga and Y. Zhang and T. Itoh and R. Maeda and T. Mihara",

year = "2009",

doi = "10.1109/ICSENS.2009.5398170",

language = "英语",

isbn = "9781424445486",

series = "Proceedings of IEEE Sensors",

pages = "266--269",

booktitle = "IEEE Sensors 2009 Conference - SENSORS 2009",

note = "IEEE Sensors 2009 Conference - SENSORS 2009 ; Conference date: 25-10-2009 Through 28-10-2009",

}

Lu, J, Suga, T, Zhang, Y, Itoh, T, Maeda, R & Mihara, T 2009, Highly integrated ultra-sensitive silicon disk micro resonator for trace amount of chemicals detection. in IEEE Sensors 2009 Conference - SENSORS 2009., 5398170, Proceedings of IEEE Sensors, pp. 266-269, IEEE Sensors 2009 Conference - SENSORS 2009, Christchurch, New Zealand, 25/10/09. https://doi.org/10.1109/ICSENS.2009.5398170

TY - GEN

T1 - Highly integrated ultra-sensitive silicon disk micro resonator for trace amount of chemicals detection

AU - Lu, J.

AU - Suga, T.

AU - Zhang, Y.

AU - Itoh, T.

AU - Maeda, R.

AU - Mihara, T.

PY - 2009

Y1 - 2009

N2 - Highly integrated silicon disk micro resonator with excellent quality factor, 1319 in air, was developed in this work for trace amount of chemicals detection. On resonator integrated piezoelectric PZT thin film enables low driving voltage (∼0.2V), good impedance matching with ICs and self actuation self sensing capability. The energy dissipation and other negative effects from PZT electrode stack were successfully compressed by refining the resonator's geometry. The proposed resonator is promising to wireless sensor network for human healthcare applications.

AB - Highly integrated silicon disk micro resonator with excellent quality factor, 1319 in air, was developed in this work for trace amount of chemicals detection. On resonator integrated piezoelectric PZT thin film enables low driving voltage (∼0.2V), good impedance matching with ICs and self actuation self sensing capability. The energy dissipation and other negative effects from PZT electrode stack were successfully compressed by refining the resonator's geometry. The proposed resonator is promising to wireless sensor network for human healthcare applications.

UR - https://www.scopus.com/pages/publications/77951106609

U2 - 10.1109/ICSENS.2009.5398170

DO - 10.1109/ICSENS.2009.5398170

M3 - 会议稿件

AN - SCOPUS:77951106609

SN - 9781424445486

T3 - Proceedings of IEEE Sensors

SP - 266

EP - 269

BT - IEEE Sensors 2009 Conference - SENSORS 2009

T2 - IEEE Sensors 2009 Conference - SENSORS 2009

Y2 - 25 October 2009 through 28 October 2009

ER -

Highly integrated ultra-sensitive silicon disk micro resonator for trace amount of chemicals detection

Abstract

Publication series

Conference

UN SDGs

Access to Document

Other files and links

Fingerprint

Cite this