High throughput fabrication process for polymer MEMS using molding and printed pattern transfer

We propose a new MEMS fabrication method utilizing a mold replication process and a pattern transfer on the screen-printed film. The polymer MEMS device was fabricated in fabrication characteristic with a high-throughput and all vacuum less process. By combination of replication process and the screen-printed film with a stacking layer of silver electrode ink/polymer-piezoelectric PVDF material/silver electrode ink, piezoelectric cantilevers were fabricated at one replication process. The MEMS device was fabricated in replication time as short as 30 second. The signals were corresponded to the deformations of the cantilever. We consider that the process has a potential to attain MEMS device production in low-cost and wide device-area.