High-sensitive piezoelectrically-transduced silicon disk micro resonator for on-chip human healthcare

In-home healthcare and smart nursing are highly promoted recently by progress and advances in micro electromechanical systems (MEMS) and wireless sensor network (WSN) technology. In this work, a piezoelectric lead zirconate titanate (PZT) thin film actuated and sensed single crystal silicon disk resonator with excellent system integration capability, low driving voltage and great mechanical quality factor (Q-factor) was successfully developed for trace amount of chemicals detection as well as for recognition of gas molecular from human breath. The Q-factor dependence on geometries of the disk and the PZT pattern was investigated and discussed both in air and under reduced pressure. The equivalent capacitance and resistance of the PZT film at resonant frequency were measured. Applications in on-chip human healthcare are expected after system integration with CMOS and other MEMS components.