High-sensitive piezoelectrically-transduced silicon disk micro resonator for on-chip human healthcare

Jian Lu; Tadatomo Suga; Yi Zhang; Toshihiro Itoh; Ryutaro Maeda; Takashi Mihara

High-sensitive piezoelectrically-transduced silicon disk micro resonator for on-chip human healthcare

Jian Lu
, Tadatomo Suga
, Yi Zhang
, Toshihiro Itoh
, Ryutaro Maeda
, Takashi Mihara

The University of Tokyo
National Institute of Advanced Industrial Science and Technology
Olympus Corporation

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In-home healthcare and smart nursing are highly promoted recently by progress and advances in micro electromechanical systems (MEMS) and wireless sensor network (WSN) technology. In this work, a piezoelectric lead zirconate titanate (PZT) thin film actuated and sensed single crystal silicon disk resonator with excellent system integration capability, low driving voltage and great mechanical quality factor (Q-factor) was successfully developed for trace amount of chemicals detection as well as for recognition of gas molecular from human breath. The Q-factor dependence on geometries of the disk and the PZT pattern was investigated and discussed both in air and under reduced pressure. The equivalent capacitance and resistance of the PZT film at resonant frequency were measured. Applications in on-chip human healthcare are expected after system integration with CMOS and other MEMS components.

Original language	English
Title of host publication	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Pages	114-118
Number of pages	5
State	Published - 2010
Externally published	Yes
Event	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 - Seville, Spain Duration: 5 May 2010 → 7 May 2010

Publication series

Name	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Conference

Conference	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Country/Territory	Spain
City	Seville
Period	5/05/10 → 7/05/10

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being

Cite this

@inproceedings{2ede3e6d5dc1489d995a6935cc1a4ef2,

title = "High-sensitive piezoelectrically-transduced silicon disk micro resonator for on-chip human healthcare",

abstract = "In-home healthcare and smart nursing are highly promoted recently by progress and advances in micro electromechanical systems (MEMS) and wireless sensor network (WSN) technology. In this work, a piezoelectric lead zirconate titanate (PZT) thin film actuated and sensed single crystal silicon disk resonator with excellent system integration capability, low driving voltage and great mechanical quality factor (Q-factor) was successfully developed for trace amount of chemicals detection as well as for recognition of gas molecular from human breath. The Q-factor dependence on geometries of the disk and the PZT pattern was investigated and discussed both in air and under reduced pressure. The equivalent capacitance and resistance of the PZT film at resonant frequency were measured. Applications in on-chip human healthcare are expected after system integration with CMOS and other MEMS components.",

author = "Jian Lu and Tadatomo Suga and Yi Zhang and Toshihiro Itoh and Ryutaro Maeda and Takashi Mihara",

year = "2010",

language = "英语",

isbn = "9782355000119",

series = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010",

pages = "114--118",

booktitle = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010",

note = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 ; Conference date: 05-05-2010 Through 07-05-2010",

}

Lu, J, Suga, T, Zhang, Y, Itoh, T, Maeda, R & Mihara, T 2010, High-sensitive piezoelectrically-transduced silicon disk micro resonator for on-chip human healthcare. in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010., 5486482, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010, pp. 114-118, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010, Seville, Spain, 5/05/10.

High-sensitive piezoelectrically-transduced silicon disk micro resonator for on-chip human healthcare. / Lu, Jian; Suga, Tadatomo; Zhang, Yi et al.
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010. 2010. p. 114-118 5486482 (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - High-sensitive piezoelectrically-transduced silicon disk micro resonator for on-chip human healthcare

AU - Lu, Jian

AU - Suga, Tadatomo

AU - Zhang, Yi

AU - Itoh, Toshihiro

AU - Maeda, Ryutaro

AU - Mihara, Takashi

PY - 2010

Y1 - 2010

N2 - In-home healthcare and smart nursing are highly promoted recently by progress and advances in micro electromechanical systems (MEMS) and wireless sensor network (WSN) technology. In this work, a piezoelectric lead zirconate titanate (PZT) thin film actuated and sensed single crystal silicon disk resonator with excellent system integration capability, low driving voltage and great mechanical quality factor (Q-factor) was successfully developed for trace amount of chemicals detection as well as for recognition of gas molecular from human breath. The Q-factor dependence on geometries of the disk and the PZT pattern was investigated and discussed both in air and under reduced pressure. The equivalent capacitance and resistance of the PZT film at resonant frequency were measured. Applications in on-chip human healthcare are expected after system integration with CMOS and other MEMS components.

AB - In-home healthcare and smart nursing are highly promoted recently by progress and advances in micro electromechanical systems (MEMS) and wireless sensor network (WSN) technology. In this work, a piezoelectric lead zirconate titanate (PZT) thin film actuated and sensed single crystal silicon disk resonator with excellent system integration capability, low driving voltage and great mechanical quality factor (Q-factor) was successfully developed for trace amount of chemicals detection as well as for recognition of gas molecular from human breath. The Q-factor dependence on geometries of the disk and the PZT pattern was investigated and discussed both in air and under reduced pressure. The equivalent capacitance and resistance of the PZT film at resonant frequency were measured. Applications in on-chip human healthcare are expected after system integration with CMOS and other MEMS components.

UR - https://www.scopus.com/pages/publications/77957830906

M3 - 会议稿件

AN - SCOPUS:77957830906

SN - 9782355000119

T3 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

SP - 114

EP - 118

BT - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

T2 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Y2 - 5 May 2010 through 7 May 2010

ER -

High-sensitive piezoelectrically-transduced silicon disk micro resonator for on-chip human healthcare

Abstract

Publication series

Conference

UN SDGs

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