High-sensitive chemical sensor system employing a higher-mode operative micro cantilever sensor and an adsorption tube

Takashi Mihara; Tsuyoshi Ikehara; Jian Lu; Ryutaro Maeda; Tadashi Fukawa; Mutsumi Kimura; Ye Liu; Toshihiro Hirai

doi:10.1063/1.3156631

High-sensitive chemical sensor system employing a higher-mode operative micro cantilever sensor and an adsorption tube

Takashi Mihara
, Tsuyoshi Ikehara
, Jian Lu
, Ryutaro Maeda
, Tadashi Fukawa
, Mutsumi Kimura
, Ye Liu
, Toshihiro Hirai

Olympus Corporation
National Institute of Advanced Industrial Science and Technology
Shinshu University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

8 Scopus citations

Abstract

We report the basic functions and the sensitivity improvement of a chemical sensor system employing a polybutadiene (PBD) coated micro cantilever sensor and a carbon-fiber-filled adsorption tube. The improvements of the sensitivity were carried out by two methods as 1) reduction of the volume in sensor camber by 1/30, 2) enlargement of the resonance frequency of the cantilever by 4.6 using a high speed analog-oscillation circuits and a low noise package. Using the 4th vibration mode (resonant frequency 715kHz) of a PBD coated cantilever (length 500μm, width 100μm , thickness 5μm ) and a small sensor chamber with a volume of 3.5cc, the sensitivity was enhanced to be 2.4Hz/ppm for toluene in nitrogen carrier gas with 10 minute adsorption time, which was about 100 times larger than our previous sensor system.

Original language	English
Title of host publication	Olfaction and Electronic Nose - Proceedings of the 13th International Symposium on Olfaction and Electronic Nose, ISOEN
Pages	79-82
Number of pages	4
DOIs	https://doi.org/10.1063/1.3156631
State	Published - 2009
Externally published	Yes
Event	13th International Symposium on Olfaction and Electronic Nose, ISOEN - Brescia, Italy Duration: 15 Apr 2009 → 17 Apr 2009

Publication series

Name	AIP Conference Proceedings
Volume	1137
ISSN (Print)	0094-243X
ISSN (Electronic)	1551-7616

Conference

Conference	13th International Symposium on Olfaction and Electronic Nose, ISOEN
Country/Territory	Italy
City	Brescia
Period	15/04/09 → 17/04/09

Keywords

Adsorption tube
Chemical sensor
Micro cantilever
Poly-butadiene

Access to Document

10.1063/1.3156631

Cite this

Mihara, T., Ikehara, T., Lu, J., Maeda, R., Fukawa, T., Kimura, M., Liu, Y., & Hirai, T. (2009). High-sensitive chemical sensor system employing a higher-mode operative micro cantilever sensor and an adsorption tube. In Olfaction and Electronic Nose - Proceedings of the 13th International Symposium on Olfaction and Electronic Nose, ISOEN (pp. 79-82). (AIP Conference Proceedings; Vol. 1137). https://doi.org/10.1063/1.3156631

@inproceedings{daa9e14a9223495cbce0f936e1f5beb3,

title = "High-sensitive chemical sensor system employing a higher-mode operative micro cantilever sensor and an adsorption tube",

abstract = "We report the basic functions and the sensitivity improvement of a chemical sensor system employing a polybutadiene (PBD) coated micro cantilever sensor and a carbon-fiber-filled adsorption tube. The improvements of the sensitivity were carried out by two methods as 1) reduction of the volume in sensor camber by 1/30, 2) enlargement of the resonance frequency of the cantilever by 4.6 using a high speed analog-oscillation circuits and a low noise package. Using the 4th vibration mode (resonant frequency 715kHz) of a PBD coated cantilever (length 500μm, width 100μm , thickness 5μm ) and a small sensor chamber with a volume of 3.5cc, the sensitivity was enhanced to be 2.4Hz/ppm for toluene in nitrogen carrier gas with 10 minute adsorption time, which was about 100 times larger than our previous sensor system.",

keywords = "Adsorption tube, Chemical sensor, Micro cantilever, Poly-butadiene",

author = "Takashi Mihara and Tsuyoshi Ikehara and Jian Lu and Ryutaro Maeda and Tadashi Fukawa and Mutsumi Kimura and Ye Liu and Toshihiro Hirai",

year = "2009",

doi = "10.1063/1.3156631",

language = "英语",

isbn = "9780735406742",

series = "AIP Conference Proceedings",

pages = "79--82",

booktitle = "Olfaction and Electronic Nose - Proceedings of the 13th International Symposium on Olfaction and Electronic Nose, ISOEN",

note = "13th International Symposium on Olfaction and Electronic Nose, ISOEN ; Conference date: 15-04-2009 Through 17-04-2009",

}

Mihara, T, Ikehara, T, Lu, J, Maeda, R, Fukawa, T, Kimura, M, Liu, Y & Hirai, T 2009, High-sensitive chemical sensor system employing a higher-mode operative micro cantilever sensor and an adsorption tube. in Olfaction and Electronic Nose - Proceedings of the 13th International Symposium on Olfaction and Electronic Nose, ISOEN. AIP Conference Proceedings, vol. 1137, pp. 79-82, 13th International Symposium on Olfaction and Electronic Nose, ISOEN, Brescia, Italy, 15/04/09. https://doi.org/10.1063/1.3156631

High-sensitive chemical sensor system employing a higher-mode operative micro cantilever sensor and an adsorption tube. / Mihara, Takashi; Ikehara, Tsuyoshi; Lu, Jian et al.
Olfaction and Electronic Nose - Proceedings of the 13th International Symposium on Olfaction and Electronic Nose, ISOEN. 2009. p. 79-82 (AIP Conference Proceedings; Vol. 1137).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - High-sensitive chemical sensor system employing a higher-mode operative micro cantilever sensor and an adsorption tube

AU - Mihara, Takashi

AU - Ikehara, Tsuyoshi

AU - Lu, Jian

AU - Maeda, Ryutaro

AU - Fukawa, Tadashi

AU - Kimura, Mutsumi

AU - Liu, Ye

AU - Hirai, Toshihiro

PY - 2009

Y1 - 2009

N2 - We report the basic functions and the sensitivity improvement of a chemical sensor system employing a polybutadiene (PBD) coated micro cantilever sensor and a carbon-fiber-filled adsorption tube. The improvements of the sensitivity were carried out by two methods as 1) reduction of the volume in sensor camber by 1/30, 2) enlargement of the resonance frequency of the cantilever by 4.6 using a high speed analog-oscillation circuits and a low noise package. Using the 4th vibration mode (resonant frequency 715kHz) of a PBD coated cantilever (length 500μm, width 100μm , thickness 5μm ) and a small sensor chamber with a volume of 3.5cc, the sensitivity was enhanced to be 2.4Hz/ppm for toluene in nitrogen carrier gas with 10 minute adsorption time, which was about 100 times larger than our previous sensor system.

AB - We report the basic functions and the sensitivity improvement of a chemical sensor system employing a polybutadiene (PBD) coated micro cantilever sensor and a carbon-fiber-filled adsorption tube. The improvements of the sensitivity were carried out by two methods as 1) reduction of the volume in sensor camber by 1/30, 2) enlargement of the resonance frequency of the cantilever by 4.6 using a high speed analog-oscillation circuits and a low noise package. Using the 4th vibration mode (resonant frequency 715kHz) of a PBD coated cantilever (length 500μm, width 100μm , thickness 5μm ) and a small sensor chamber with a volume of 3.5cc, the sensitivity was enhanced to be 2.4Hz/ppm for toluene in nitrogen carrier gas with 10 minute adsorption time, which was about 100 times larger than our previous sensor system.

KW - Adsorption tube

KW - Chemical sensor

KW - Micro cantilever

KW - Poly-butadiene

UR - https://www.scopus.com/pages/publications/70450178322

U2 - 10.1063/1.3156631

DO - 10.1063/1.3156631

M3 - 会议稿件

AN - SCOPUS:70450178322

SN - 9780735406742

T3 - AIP Conference Proceedings

SP - 79

EP - 82

BT - Olfaction and Electronic Nose - Proceedings of the 13th International Symposium on Olfaction and Electronic Nose, ISOEN

T2 - 13th International Symposium on Olfaction and Electronic Nose, ISOEN

Y2 - 15 April 2009 through 17 April 2009

ER -

Mihara T, Ikehara T, Lu J, Maeda R, Fukawa T, Kimura M et al. High-sensitive chemical sensor system employing a higher-mode operative micro cantilever sensor and an adsorption tube. In Olfaction and Electronic Nose - Proceedings of the 13th International Symposium on Olfaction and Electronic Nose, ISOEN. 2009. p. 79-82. (AIP Conference Proceedings). doi: 10.1063/1.3156631

High-sensitive chemical sensor system employing a higher-mode operative micro cantilever sensor and an adsorption tube

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this