High-Q and CMOS compatible single crystal silicon cantilever with separated on-chip piezoelectric actuator for ultra-sensitive mass detection

J. Lu; T. Ikehara; Y. Zhang; T. Mihara; T. Itoh; R. Maeda

doi:10.1109/MEMSYS.2008.4443744

High-Q and CMOS compatible single crystal silicon cantilever with separated on-chip piezoelectric actuator for ultra-sensitive mass detection

J. Lu
, T. Ikehara
, Y. Zhang
, T. Mihara
, T. Itoh
, R. Maeda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

7 Scopus citations

Abstract

A CMOS compatible single-crystal silicon cantilever with on-chip piezoelectric PZT actuator was developed for ultra-sensitive mass detection. Excellent Q-factor of 1113, which is several times higher than latest reported Q-factor of integrated micro cantilevers, was sucessfully achieved by seperating the piezoelectric actuator from the resonant structure to reduce intrinsic energy dissipation in PZT film. A piezoresistive Wheatstone-bridge gauge was integrated to detect the resonant frequency of the cantilever for better impedence matching with electric circuits. The proposed structure exhibits potential applications in parallel sensor system or networked sensor technology with sub-femtogram level resolution.

Original language	English
Title of host publication	MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems
Pages	665-668
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443744
State	Published - 2008
Externally published	Yes
Event	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson - Tucson, AZ, United States Duration: 13 Jan 2008 → 17 Jan 2008

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson
Country/Territory	United States
City	Tucson, AZ
Period	13/01/08 → 17/01/08

Access to Document

10.1109/MEMSYS.2008.4443744

Cite this

Lu, J., Ikehara, T., Zhang, Y., Mihara, T., Itoh, T., & Maeda, R. (2008). High-Q and CMOS compatible single crystal silicon cantilever with separated on-chip piezoelectric actuator for ultra-sensitive mass detection. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems (pp. 665-668). Article 4443744 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2008.4443744

Lu, J. ; Ikehara, T. ; Zhang, Y. et al. / High-Q and CMOS compatible single crystal silicon cantilever with separated on-chip piezoelectric actuator for ultra-sensitive mass detection. MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. pp. 665-668 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{51e9640107c644adb1a5c95feedca1d6,

title = "High-Q and CMOS compatible single crystal silicon cantilever with separated on-chip piezoelectric actuator for ultra-sensitive mass detection",

abstract = "A CMOS compatible single-crystal silicon cantilever with on-chip piezoelectric PZT actuator was developed for ultra-sensitive mass detection. Excellent Q-factor of 1113, which is several times higher than latest reported Q-factor of integrated micro cantilevers, was sucessfully achieved by seperating the piezoelectric actuator from the resonant structure to reduce intrinsic energy dissipation in PZT film. A piezoresistive Wheatstone-bridge gauge was integrated to detect the resonant frequency of the cantilever for better impedence matching with electric circuits. The proposed structure exhibits potential applications in parallel sensor system or networked sensor technology with sub-femtogram level resolution.",

author = "J. Lu and T. Ikehara and Y. Zhang and T. Mihara and T. Itoh and R. Maeda",

year = "2008",

doi = "10.1109/MEMSYS.2008.4443744",

language = "英语",

isbn = "9781424417933",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "665--668",

booktitle = "MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems",

note = "21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson ; Conference date: 13-01-2008 Through 17-01-2008",

}

Lu, J, Ikehara, T, Zhang, Y, Mihara, T, Itoh, T & Maeda, R 2008, High-Q and CMOS compatible single crystal silicon cantilever with separated on-chip piezoelectric actuator for ultra-sensitive mass detection. in MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems., 4443744, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 665-668, 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008 Tucson, Tucson, AZ, United States, 13/01/08. https://doi.org/10.1109/MEMSYS.2008.4443744

High-Q and CMOS compatible single crystal silicon cantilever with separated on-chip piezoelectric actuator for ultra-sensitive mass detection. / Lu, J.; Ikehara, T.; Zhang, Y. et al.
MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 665-668 4443744 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Lu, J.

AU - Ikehara, T.

AU - Zhang, Y.

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AU - Itoh, T.

AU - Maeda, R.

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N2 - A CMOS compatible single-crystal silicon cantilever with on-chip piezoelectric PZT actuator was developed for ultra-sensitive mass detection. Excellent Q-factor of 1113, which is several times higher than latest reported Q-factor of integrated micro cantilevers, was sucessfully achieved by seperating the piezoelectric actuator from the resonant structure to reduce intrinsic energy dissipation in PZT film. A piezoresistive Wheatstone-bridge gauge was integrated to detect the resonant frequency of the cantilever for better impedence matching with electric circuits. The proposed structure exhibits potential applications in parallel sensor system or networked sensor technology with sub-femtogram level resolution.

AB - A CMOS compatible single-crystal silicon cantilever with on-chip piezoelectric PZT actuator was developed for ultra-sensitive mass detection. Excellent Q-factor of 1113, which is several times higher than latest reported Q-factor of integrated micro cantilevers, was sucessfully achieved by seperating the piezoelectric actuator from the resonant structure to reduce intrinsic energy dissipation in PZT film. A piezoresistive Wheatstone-bridge gauge was integrated to detect the resonant frequency of the cantilever for better impedence matching with electric circuits. The proposed structure exhibits potential applications in parallel sensor system or networked sensor technology with sub-femtogram level resolution.

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DO - 10.1109/MEMSYS.2008.4443744

M3 - 会议稿件

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Lu J, Ikehara T, Zhang Y, Mihara T, Itoh T, Maeda R. High-Q and CMOS compatible single crystal silicon cantilever with separated on-chip piezoelectric actuator for ultra-sensitive mass detection. In MEMS 2008 Tucson - 21st IEEE International Conference on Micro Electro Mechanical Systems. 2008. p. 665-668. 4443744. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2008.4443744

High-Q and CMOS compatible single crystal silicon cantilever with separated on-chip piezoelectric actuator for ultra-sensitive mass detection

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