Abstract
A novel automatic multi-channel measurement system is developed for evaluation of multi-layer thin films. With the aim to solve the unsuitability of conventional four-probe measurements with van der Pauw and Montgomery configurations for multi-layer thin film structure, this measurement system can acquire the temperature coefficient of resistance (TCR) and the I-V characteristics of multi-layer thin films. The wireless technology adopted in this measurement system separates the data acquisition and control circuit, which facilitates the application of the system. The maximum measurement capability of multi-channel acquisition system is 16 samples in a batch. The present work also proposes a highly accurate resistance measurement method for characterizing the multi-layer thin films. The advantages of this system include perfect functions, user-friendly interface, high integration and low-cost. The practical application of the system demonstrates a measurement error less than 0.005% of sample resistance. The testing results show that this system performed well in multi-layer thin film measurement.
| Original language | English |
|---|---|
| Pages (from-to) | 3600-3611 |
| Number of pages | 12 |
| Journal | Measurement: Journal of the International Measurement Confederation |
| Volume | 46 |
| Issue number | 9 |
| DOIs | |
| State | Published - 2013 |
| Externally published | Yes |
Keywords
- Multi-layer thin film
- Resistance measurement with high accuracy
- TCR measurement
- Wireless communication