High aspect ratio fabrications of micro journal air bearings for micro gas turbine engine

X. C. Shan; Y. Murakoshi; Z. F. Wang; H. J. Lu; Y. F. Jin; T. Ikehara; R. Maeda; C. K. Wong

doi:10.1117/12.522918

High aspect ratio fabrications of micro journal air bearings for micro gas turbine engine

X. C. Shan
, Y. Murakoshi
, Z. F. Wang
, H. J. Lu
, Y. F. Jin
, T. Ikehara
, R. Maeda
, C. K. Wong

Agency for Science, Technology and Research, Singapore
National Institute of Advanced Industrial Science and Technology

Research output: Contribution to journal › Conference article › peer-review

7 Scopus citations

Abstract

In micro fabricated gas turbine engine, a micro journal air bearing is used to offer high speed and low wear operations. Fabrication of such a journal bearing is a critical challenge since the clearance of the bearing is only several micrometers with aspect ratio of more than 20. This paper reports on the fabrication of ultra-high aspect ratio micro journal air bearing using ICP DRIE (inductively coupled plasma deep reactive ion etching) process. The process parameters that resulted in bowed and tapered journal bearing were investigated to improve the profile of the etched journal bearing. Micro journal bearings with sidewall verticality of almost 90° were obtained.

Original language	English
Pages (from-to)	428-433
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5276
DOIs	https://doi.org/10.1117/12.522918
State	Published - 2004
Externally published	Yes
Event	Device and Process Technologies for MEMS, Microelectronics, and Photonics III - Perth, WA, Australia Duration: 10 Dec 2003 → 12 Dec 2003

Keywords

Aspect ratio
Bias power
ICP DRIE
Micro journal bearing
Source power

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10.1117/12.522918

Cite this

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title = "High aspect ratio fabrications of micro journal air bearings for micro gas turbine engine",

abstract = "In micro fabricated gas turbine engine, a micro journal air bearing is used to offer high speed and low wear operations. Fabrication of such a journal bearing is a critical challenge since the clearance of the bearing is only several micrometers with aspect ratio of more than 20. This paper reports on the fabrication of ultra-high aspect ratio micro journal air bearing using ICP DRIE (inductively coupled plasma deep reactive ion etching) process. The process parameters that resulted in bowed and tapered journal bearing were investigated to improve the profile of the etched journal bearing. Micro journal bearings with sidewall verticality of almost 90° were obtained.",

keywords = "Aspect ratio, Bias power, ICP DRIE, Micro journal bearing, Source power",

author = "Shan, \{X. C.\} and Y. Murakoshi and Wang, \{Z. F.\} and Lu, \{H. J.\} and Jin, \{Y. F.\} and T. Ikehara and R. Maeda and Wong, \{C. K.\}",

year = "2004",

doi = "10.1117/12.522918",

language = "英语",

volume = "5276",

pages = "428--433",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Device and Process Technologies for MEMS, Microelectronics, and Photonics III ; Conference date: 10-12-2003 Through 12-12-2003",

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TY - JOUR

T1 - High aspect ratio fabrications of micro journal air bearings for micro gas turbine engine

AU - Shan, X. C.

AU - Murakoshi, Y.

AU - Wang, Z. F.

AU - Lu, H. J.

AU - Jin, Y. F.

AU - Ikehara, T.

AU - Maeda, R.

AU - Wong, C. K.

PY - 2004

Y1 - 2004

N2 - In micro fabricated gas turbine engine, a micro journal air bearing is used to offer high speed and low wear operations. Fabrication of such a journal bearing is a critical challenge since the clearance of the bearing is only several micrometers with aspect ratio of more than 20. This paper reports on the fabrication of ultra-high aspect ratio micro journal air bearing using ICP DRIE (inductively coupled plasma deep reactive ion etching) process. The process parameters that resulted in bowed and tapered journal bearing were investigated to improve the profile of the etched journal bearing. Micro journal bearings with sidewall verticality of almost 90° were obtained.

AB - In micro fabricated gas turbine engine, a micro journal air bearing is used to offer high speed and low wear operations. Fabrication of such a journal bearing is a critical challenge since the clearance of the bearing is only several micrometers with aspect ratio of more than 20. This paper reports on the fabrication of ultra-high aspect ratio micro journal air bearing using ICP DRIE (inductively coupled plasma deep reactive ion etching) process. The process parameters that resulted in bowed and tapered journal bearing were investigated to improve the profile of the etched journal bearing. Micro journal bearings with sidewall verticality of almost 90° were obtained.

KW - Aspect ratio

KW - Bias power

KW - ICP DRIE

KW - Micro journal bearing

KW - Source power

UR - https://www.scopus.com/pages/publications/2442486601

U2 - 10.1117/12.522918

DO - 10.1117/12.522918

M3 - 会议文章

AN - SCOPUS:2442486601

SN - 0277-786X

VL - 5276

SP - 428

EP - 433

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Device and Process Technologies for MEMS, Microelectronics, and Photonics III

Y2 - 10 December 2003 through 12 December 2003

ER -

High aspect ratio fabrications of micro journal air bearings for micro gas turbine engine

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Keywords

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