High accuracy measurement of aspherical surface by point diffraction interferometry

Fen Gao; Zhuangde Jiang; Yi Feng; Bing Li

doi:10.1109/NANO.2014.6968177

High accuracy measurement of aspherical surface by point diffraction interferometry

Fen Gao
, Zhuangde Jiang
, Yi Feng
, Bing Li

School of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

Point diffraction interferometry (PDI) provides a promising method for measurement of spherical and aspherical surfaces with nanometer or even sub-nanometer (RMS) accuracy. In this paper, an optimal design of PDI system is discussed in detail and experiment systems are established. A 152.4 mm aspheric mirror is measured in our experiment and the test results show a good agreement with Zygo interferometer testing results. Also, a novel method which combining the point diffraction interferometry and annular subaperture stitching technology for high accuracy measurement of large-departure aspherical surface is proposed and the principles are presented.

Original language	English
Title of host publication	Proceedings of the IEEE Conference on Nanotechnology
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	428-432
Number of pages	5
ISBN (Electronic)	9781479956227
DOIs	https://doi.org/10.1109/NANO.2014.6968177
State	Published - 26 Nov 2014
Event	2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014 - Toronto, Canada Duration: 18 Aug 2014 → 21 Aug 2014

Publication series

Name	Proceedings of the IEEE Conference on Nanotechnology
ISSN (Electronic)	1944-9399

Conference

Conference	2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014
Country/Territory	Canada
City	Toronto
Period	18/08/14 → 21/08/14

Access to Document

10.1109/NANO.2014.6968177

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Gao, F., Jiang, Z., Feng, Y., & Li, B. (2014). High accuracy measurement of aspherical surface by point diffraction interferometry. In Proceedings of the IEEE Conference on Nanotechnology (pp. 428-432). Article 6968177 (Proceedings of the IEEE Conference on Nanotechnology). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NANO.2014.6968177

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title = "High accuracy measurement of aspherical surface by point diffraction interferometry",

abstract = "Point diffraction interferometry (PDI) provides a promising method for measurement of spherical and aspherical surfaces with nanometer or even sub-nanometer (RMS) accuracy. In this paper, an optimal design of PDI system is discussed in detail and experiment systems are established. A 152.4 mm aspheric mirror is measured in our experiment and the test results show a good agreement with Zygo interferometer testing results. Also, a novel method which combining the point diffraction interferometry and annular subaperture stitching technology for high accuracy measurement of large-departure aspherical surface is proposed and the principles are presented.",

author = "Fen Gao and Zhuangde Jiang and Yi Feng and Bing Li",

note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014 ; Conference date: 18-08-2014 Through 21-08-2014",

year = "2014",

month = nov,

day = "26",

doi = "10.1109/NANO.2014.6968177",

language = "英语",

series = "Proceedings of the IEEE Conference on Nanotechnology",

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Gao, F, Jiang, Z, Feng, Y & Li, B 2014, High accuracy measurement of aspherical surface by point diffraction interferometry. in Proceedings of the IEEE Conference on Nanotechnology., 6968177, Proceedings of the IEEE Conference on Nanotechnology, Institute of Electrical and Electronics Engineers Inc., pp. 428-432, 2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014, Toronto, Canada, 18/08/14. https://doi.org/10.1109/NANO.2014.6968177

High accuracy measurement of aspherical surface by point diffraction interferometry. / Gao, Fen; Jiang, Zhuangde; Feng, Yi et al.
Proceedings of the IEEE Conference on Nanotechnology. Institute of Electrical and Electronics Engineers Inc., 2014. p. 428-432 6968177 (Proceedings of the IEEE Conference on Nanotechnology).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - High accuracy measurement of aspherical surface by point diffraction interferometry

AU - Gao, Fen

AU - Jiang, Zhuangde

AU - Feng, Yi

AU - Li, Bing

PY - 2014/11/26

Y1 - 2014/11/26

N2 - Point diffraction interferometry (PDI) provides a promising method for measurement of spherical and aspherical surfaces with nanometer or even sub-nanometer (RMS) accuracy. In this paper, an optimal design of PDI system is discussed in detail and experiment systems are established. A 152.4 mm aspheric mirror is measured in our experiment and the test results show a good agreement with Zygo interferometer testing results. Also, a novel method which combining the point diffraction interferometry and annular subaperture stitching technology for high accuracy measurement of large-departure aspherical surface is proposed and the principles are presented.

AB - Point diffraction interferometry (PDI) provides a promising method for measurement of spherical and aspherical surfaces with nanometer or even sub-nanometer (RMS) accuracy. In this paper, an optimal design of PDI system is discussed in detail and experiment systems are established. A 152.4 mm aspheric mirror is measured in our experiment and the test results show a good agreement with Zygo interferometer testing results. Also, a novel method which combining the point diffraction interferometry and annular subaperture stitching technology for high accuracy measurement of large-departure aspherical surface is proposed and the principles are presented.

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T3 - Proceedings of the IEEE Conference on Nanotechnology

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BT - Proceedings of the IEEE Conference on Nanotechnology

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014

Y2 - 18 August 2014 through 21 August 2014

ER -

High accuracy measurement of aspherical surface by point diffraction interferometry

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