Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars

Yue Cun Wang; Lin Tian; Fan Liu; Yuan Bin Qin; Gong Zheng; Jing Tao Wang; Evan Ma; Zhi Wei Shan

doi:10.1002/smll.201601753

Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars

Yue Cun Wang
, Lin Tian
, Fan Liu
, Yuan Bin Qin
, Gong Zheng
, Jing Tao Wang
, Evan Ma
, Zhi Wei Shan

School of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Original language	English
Article number	1601753
Journal	Small
Volume	13
Issue number	1
DOIs	https://doi.org/10.1002/smll.201601753
State	Published - Jan 2017

Keywords

helium ion microscopes
helium ions dosage
mechanical behaviors
silicon micropillars

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10.1002/smll.201601753

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@article{749f411ed67e4f81976331eb1a45faf0,

title = "Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars",

keywords = "helium ion microscopes, helium ions dosage, mechanical behaviors, silicon micropillars",

author = "Wang, \{Yue Cun\} and Lin Tian and Fan Liu and Qin, \{Yuan Bin\} and Gong Zheng and Wang, \{Jing Tao\} and Evan Ma and Shan, \{Zhi Wei\}",

year = "2017",

month = jan,

doi = "10.1002/smll.201601753",

language = "英语",

volume = "13",

journal = "Small",

issn = "1613-6810",

publisher = "Wiley-VCH Verlag",

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TY - JOUR

T1 - Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars

AU - Wang, Yue Cun

AU - Tian, Lin

AU - Liu, Fan

AU - Qin, Yuan Bin

AU - Zheng, Gong

AU - Wang, Jing Tao

AU - Ma, Evan

AU - Shan, Zhi Wei

PY - 2017/1

Y1 - 2017/1

KW - helium ion microscopes

KW - helium ions dosage

KW - mechanical behaviors

KW - silicon micropillars

UR - https://www.scopus.com/pages/publications/84990869130

U2 - 10.1002/smll.201601753

DO - 10.1002/smll.201601753

M3 - 文章

C2 - 27709779

AN - SCOPUS:84990869130

SN - 1613-6810

VL - 13

JO - Small

JF - Small

IS - 1

M1 - 1601753

ER -

Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars

Keywords

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