@article{749f411ed67e4f81976331eb1a45faf0,
title = "Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars",
keywords = "helium ion microscopes, helium ions dosage, mechanical behaviors, silicon micropillars",
author = "Wang, \{Yue Cun\} and Lin Tian and Fan Liu and Qin, \{Yuan Bin\} and Gong Zheng and Wang, \{Jing Tao\} and Evan Ma and Shan, \{Zhi Wei\}",
year = "2017",
month = jan,
doi = "10.1002/smll.201601753",
language = "英语",
volume = "13",
journal = "Small",
issn = "1613-6810",
publisher = "John Wiley and Sons Inc",
number = "1",
}