@inproceedings{999fd29224e44908ba4c5bffc1633cb8,
title = "GIAXD and XPS characterization of SP3C doped SiC superhard nanocomposite film",
abstract = "The SP3C doped SiC superhard nanocomposite films had been deposited on stainless steel (SS) substrates at different temperature by electron beam-physical vapor deposition (EB-PVD). The SP3C doped SiC film was studied by grazing incidence X-ray asymmetry diffraction (GIAXD), and X-ray photoelectron spectroscopy (XPS). The results of GIAXD showed that the SP3C doped SiC nanocomposite films were not a perfect crystal, which was composed with fine SiC nanocrystals, and a second phase very similar to diamond like carbon (DLC). XPS analysis showed that the excess C existed in the present films changed from diamond into DLC structure from the surface to inner of the films.",
keywords = "GIAXD, Microstructure, SiC, XPS",
author = "Jian Yi and Xiaodong He and Yue Sun and Zhipeng Xie and Weijiang Xue and Fenyan Cao",
year = "2012",
doi = "10.4028/www.scientific.net/KEM.512-515.971",
language = "英语",
isbn = "9783037854259",
series = "Key Engineering Materials",
publisher = "Trans Tech Publications Ltd",
pages = "971--974",
booktitle = "High-Performance Ceramics VII",
note = "7th China International Conference on High-Performance Ceramics, CICC-7 ; Conference date: 04-11-2011 Through 07-11-2011",
}