Fully suspended slot waveguides for high refractive index sensitivity

A fully suspended mid-infrared (FSMIR) slot waveguide is proposed and experimentally demonstrated on a silicon-on-insulator (SOI) platform for the first time. The slotted waveguide core is mechanically supported by lateral subwavelength grating claddings. The fabricated waveguides possess low propagation loss, which is measured to be 7.9 dB/cm at the wavelength of 2.25 μm. With the underlying buried oxide (BOX) removed, the FSMIR slot waveguide has a broad spectral range of transparency that is limited only by the absorption of silicon. Numerical simulation shows that its sensitivity, defined as the ratio between the change of the effective index and the ambient refractive index, can reach 1.123, which is 9.7% higher than the maximal sensitivity of conventional SOI slot waveguides on BOX.