Abstract
The internal resonance of electrostatically coupled cubic nonlinear low-frequency micro-resonator and linear high-frequency micro-resonator is investigated experimentally. A phenomenon of frequency locking is observed at 1:3 frequency ratio of two resonators for the first time when the coupling strength exceeds a certain value. Then the theoretical study is made to explain the frequency locking phenomenon. Finally, this phenomenon is used to enhance the short-time frequency stability of low-frequency resonator nearly 7-fold.
| Original language | English |
|---|---|
| Article number | 106981 |
| Journal | Mechanical Systems and Signal Processing |
| Volume | 146 |
| DOIs | |
| State | Published - 1 Jan 2021 |
Keywords
- Frequency locking
- Frequency stability
- Internal resonance
- MEMS
- Nonlinear dynamics
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