Formation and microstructure of ferroelectric lead lanthanum zirconate titanate thick film

M. Ichiki; J. Akedo; A. Schroth; Y. Morikawa; R. Maeda; Y. Ishikawa

Formation and microstructure of ferroelectric lead lanthanum zirconate titanate thick film

M. Ichiki
, J. Akedo
, A. Schroth
, Y. Morikawa
, R. Maeda
, Y. Ishikawa

Japan Ministry of Economy, Trade and Industry

Research output: Contribution to conference › Paper › peer-review

2 Scopus citations

Abstract

This paper reports the thick film formation of lead lanthanum zirconate titanate using a gas-deposition method from its ultra-fine particle condition. This fabrication method has been developed recently as a useful technology for smart Micro Electromechanical Systems. Thick films up to 10μm were produced. Scanning electron microscopy observation of the film surfaces was carried out. Each particle has clear grain boundary. This means a kind of firing or boundary fusion seemed to be occurred in the formation process. In this study we clarified the size of the particle would be one of the important factors on the film characteristics.

Original language	English
Pages	543-546
Number of pages	4
State	Published - 1998
Externally published	Yes
Event	Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI) - Montreaux, Switz Duration: 24 Aug 1998 → 27 Aug 1998

Conference

Conference	Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI)
City	Montreaux, Switz
Period	24/08/98 → 27/08/98

Cite this

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title = "Formation and microstructure of ferroelectric lead lanthanum zirconate titanate thick film",

abstract = "This paper reports the thick film formation of lead lanthanum zirconate titanate using a gas-deposition method from its ultra-fine particle condition. This fabrication method has been developed recently as a useful technology for smart Micro Electromechanical Systems. Thick films up to 10μm were produced. Scanning electron microscopy observation of the film surfaces was carried out. Each particle has clear grain boundary. This means a kind of firing or boundary fusion seemed to be occurred in the formation process. In this study we clarified the size of the particle would be one of the important factors on the film characteristics.",

author = "M. Ichiki and J. Akedo and A. Schroth and Y. Morikawa and R. Maeda and Y. Ishikawa",

year = "1998",

language = "英语",

pages = "543--546",

note = "Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI) ; Conference date: 24-08-1998 Through 27-08-1998",

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TY - CONF

T1 - Formation and microstructure of ferroelectric lead lanthanum zirconate titanate thick film

AU - Ichiki, M.

AU - Akedo, J.

AU - Schroth, A.

AU - Morikawa, Y.

AU - Maeda, R.

AU - Ishikawa, Y.

PY - 1998

Y1 - 1998

N2 - This paper reports the thick film formation of lead lanthanum zirconate titanate using a gas-deposition method from its ultra-fine particle condition. This fabrication method has been developed recently as a useful technology for smart Micro Electromechanical Systems. Thick films up to 10μm were produced. Scanning electron microscopy observation of the film surfaces was carried out. Each particle has clear grain boundary. This means a kind of firing or boundary fusion seemed to be occurred in the formation process. In this study we clarified the size of the particle would be one of the important factors on the film characteristics.

AB - This paper reports the thick film formation of lead lanthanum zirconate titanate using a gas-deposition method from its ultra-fine particle condition. This fabrication method has been developed recently as a useful technology for smart Micro Electromechanical Systems. Thick films up to 10μm were produced. Scanning electron microscopy observation of the film surfaces was carried out. Each particle has clear grain boundary. This means a kind of firing or boundary fusion seemed to be occurred in the formation process. In this study we clarified the size of the particle would be one of the important factors on the film characteristics.

UR - https://www.scopus.com/pages/publications/0032259564

M3 - 论文

AN - SCOPUS:0032259564

SP - 543

EP - 546

T2 - Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI)

Y2 - 24 August 1998 through 27 August 1998

ER -

Formation and microstructure of ferroelectric lead lanthanum zirconate titanate thick film

Abstract

Conference

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